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Vapor deposition equipment

A vapor deposition and equipment technology, applied in the field of vapor deposition equipment, can solve the problems of uneven thickness of boron nitride deposition, affecting the quality of workpiece processing, etc., and achieve the effect of uniform deposition thickness

Inactive Publication Date: 2019-01-18
ADVANCED FOR MATERIALS & EQUIP
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AI Technical Summary

Problems solved by technology

Chemical vapor deposition is currently the most commonly used method for preparing boron nitride coatings at home and abroad, but in the actual operation process, due to the limitations of the existing vapor deposition equipment design, the deposition thickness of boron nitride on the workpiece surface is extremely uneven, so , which greatly affects the processing quality of the workpiece

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Embodiment Construction

[0018] In order to enable those skilled in the art to better understand the technical solutions in the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described The embodiments are only some of the embodiments of the present application, but not all of them.

[0019] Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without creative efforts shall fall within the scope of protection of this application.

[0020] In the description of the present invention, it should be understood that the orientations or positional relationships indicated by the terms "inner", "outer", "below" etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention a...

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Abstract

The invention discloses vapor deposition equipment. The vapor deposition equipment comprises a shell, wherein a driving motor and a vacuum pump are arranged on the outer part of the shell, the vacuumpump is communicated with the inner cavity of the shell, a turning disc used for bearing a workpiece is arranged in the inner cavity of the shell, the turning disc is provided with an air passing hole, a rotary shaft is connected with the lower part of the turning disc, the rotary shaft is in transmission connection with the driving motor, the side wall of the shell is provided with a first air guiding pipe and a second air guiding pipe which are mutually independent, and the first air guiding pipe and the second air guiding pipe are respectively used for transmitting reaction gas needed by chemical deposition of the workpiece. The vapor deposition equipment can effectively improve the uniformity of the deposition thickness of boron nitride on the surface of the workpiece through the structural design, and the processing quality of the workpiece is improved.

Description

technical field [0001] The present invention relates to the field of chemical equipment, more specifically, to a kind of vapor deposition equipment. Background technique [0002] Chemical vapor deposition technology is a process in which gaseous substances undergo chemical reactions on solid surfaces and produce solid deposits. It roughly includes three steps: (1) Forming volatile substances; (2) Transferring the above substances to the deposition area; ( 3) A chemical reaction occurs on a solid and produces a solid substance. [0003] Boron nitride has good oxidation resistance, thermal shock resistance and chemical stability, and has a hexagonal sheet structure similar to graphite. Using it as a coating material can greatly improve the thermal stability and mechanical properties of composite materials. Performance, so it is widely used in electronic equipment, microwave devices, wave-transparent materials, friction materials and aerospace fields. Chemical vapor depositio...

Claims

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Application Information

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IPC IPC(8): C23C16/34C23C16/455
CPCC23C16/342C23C16/45512
Inventor 胡祥龙周岳兵胡高健戴煜
Owner ADVANCED FOR MATERIALS & EQUIP
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