Double optical frequency comb thickness measuring optical path structure, system, method and device and storage medium
An optical frequency comb and optical optical path technology, applied in the field of double optical frequency comb thickness measurement optical path structure, can solve the problems of establishing connection and inability to measure, and achieve the effect of improving the signal-to-noise ratio and high real-time performance
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Embodiment 1
[0053] This embodiment provides a dual optical frequency comb thickness measurement system, which consists of three parts: a laser light source, a novel dual optical frequency comb Michelson interferometer thickness measurement optical path structure, and a signal acquisition and data processing module. The system only needs to use a single-point photodetector to accurately measure the thickness between the optical surfaces of the object to be measured. The object to be measured can be an optical lens, film thickness, etc. The object to be measured is placed in the optical path structure, and the light reflected by each surface to be measured is received by the photodetector, and the thickness is calculated through signal collection and processing.
[0054] 1. Laser light source
[0055] Such as figure 1 As shown, the laser light source needs to use two optical frequency comb lasers with stable repetition rate, which are respectively used as the local oscillator light source ...
Embodiment 2
[0074] This embodiment provides a dual optical frequency comb thickness measurement method, including steps:
[0075] 1. Interference light generation steps
[0076] Use a signal optical frequency comb with a fixed repetition frequency difference with the local oscillator optical frequency comb to reflect from the two surfaces of the object to be measured to form measurement light;
[0077] The measurement light and the local oscillator optical frequency comb are superimposed to form an interference signal.
[0078] 2. Signal acquisition and processing steps
[0079] Obtain an interference signal; the interference signal includes a local oscillator optical frequency comb and an optical signal formed by the superposition of two sets of measurement lights reflected by the two surfaces of the object to be measured;
[0080] The thickness D of the object to be measured is calculated according to the repetition frequency of the local oscillator optical frequency comb and the meas...
Embodiment 3
[0092] This embodiment provides a dual optical frequency comb thickness measuring device, including:
[0093] The interference light generation module is used to use a signal optical frequency comb with a fixed repetition frequency difference with the local oscillator optical frequency comb to reflect through the two surfaces of the object to be measured to form measurement light, and to superimpose the measurement light and the local oscillator optical frequency comb to form interference signal.
[0094] The acquisition module is used to acquire interference signals, the interference signals include a local oscillator optical frequency comb and an optical signal formed by superposition of two sets of measurement lights reflected by the two surfaces of the object to be measured. The pulse signal of the local oscillator optical frequency comb can be used as the sampling clock signal to collect the interference signal including multiple interference periods.
[0095] The thickn...
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