Microcomputer voltage electric ultrasonic transducer with etching hole and sectioned upper electrode

A block-etching and hole-etching technology, which is applied in the direction of fluid using vibration, can solve the problems of low signal-to-noise ratio and low sensitivity, and achieve the effects of improving sensitivity, reducing stiffness, and reducing parasitic capacitance

Pending Publication Date: 2019-01-25
ZHEJIANG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] The purpose of the present invention is to solve the problems of low signal-to-noise ratio and low sensitivity in the prior art, and provide a microcomputer piezoelectric ultrasonic transducer with etched holes and segmented upper electrodes

Method used

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  • Microcomputer voltage electric ultrasonic transducer with etching hole and sectioned upper electrode
  • Microcomputer voltage electric ultrasonic transducer with etching hole and sectioned upper electrode
  • Microcomputer voltage electric ultrasonic transducer with etching hole and sectioned upper electrode

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Embodiment Construction

[0028] The present invention will be further elaborated and illustrated below in conjunction with the accompanying drawings and specific embodiments. The technical features of the various implementations in the present invention can be combined accordingly on the premise that there is no conflict with each other.

[0029] Such as Figure 1~3 As shown, a microcomputer piezoelectric ultrasonic transducer with etched holes and segmented upper electrodes mainly includes a substrate 4 , a bottom electrode 3 , a piezoelectric layer 2 and an upper electrode 1 . A groove-shaped cavity is selectively etched on the back of the substrate 4 to form an elastic structural layer 41 with a certain thickness on the front of the substrate 4, and the unetched part of the substrate 4 around the elastic structural layer 41 forms a fixed end (anchor end). The bottom electrode 3 , the piezoelectric layer 2 and the upper electrode 1 are sequentially stacked on the front of the elastic structural lay...

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Abstract

The invention discloses a microcomputer voltage electric ultrasonic transducer with an etching hole and a sectioned upper electrode. The transducer is provided with a substrate, a structural layer, abottom electrode, a piezoelectric layer and the upper electrode. A working principle of the transducer is that direct and inverse piezoelectric effects are used for realizing conversion from mechanical energy to electric energy or the electric energy to the mechanical energy. The transducer is capable of dividing the upper electrode and the piezoelectric layer in an original square ring structureto four pieces of equal area rectangular structures. Such structure is capable of reducing an opposite area of the upper electrode and the bottom electrode, thereby reducing a stray capacitance, and improving a signal to noise ratio of the ultrasonic transducer. At the same time, small holes are etched at four empty corners, so rigidity of a vibrating diaphragm is advantageously reduced, and transmitting sensitivity of the transducer is improved, thereby loss of the transmitting sensitivity of the transducer caused by reducing the area of the upper electrode is remedied.

Description

technical field [0001] The invention belongs to the field of transducers in the technical field of micro-electromechanical systems (MEMS), in particular to a piezoelectric ultrasonic transducer with high signal-to-noise ratio and high sensitivity. Background technique [0002] Piezoelectric ultrasonic transducer is a device that can convert electrical energy into mechanical energy, and convert mechanical energy into electrical energy, which integrates sending and receiving ultrasonic waves. Traditional ultrasonic transducers are machined, which is bulky, high power consumption, and unfavorable for integration, and because their acoustic impedance does not match traditional acoustic transmission media (air, water), their acoustic emission efficiency is low. The micro-electro-mechanical ultrasonic transducer processed by the micro-manufacturing process combined with the micro-electro-mechanical system technology effectively overcomes the above-mentioned shortcomings. Microele...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B06B1/06
CPCB06B1/06
Inventor 谢金杨邓飞陈旭颖
Owner ZHEJIANG UNIV
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