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Device for preventing dust scattering and substrate machining apparatus having the same

A processing device and substrate technology, applied in stone processing tools, glass cutting devices, stone processing equipment, etc., can solve problems such as deterioration of the working environment and strength, and achieve high-precision quality effects

Inactive Publication Date: 2019-02-12
MITSUBOSHI DIAMOND IND CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

That is, scratches on the glass plate cause strength deterioration, and foreign matter attached to the glass plate is transported to the organic film forming process, causing deterioration of the working environment

Method used

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  • Device for preventing dust scattering and substrate machining apparatus having the same
  • Device for preventing dust scattering and substrate machining apparatus having the same
  • Device for preventing dust scattering and substrate machining apparatus having the same

Examples

Experimental program
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Effect test

Embodiment Construction

[0066] Hereinafter, an embodiment of the dust scattering prevention device and the substrate processing device of the present invention will be described in detail with reference to the drawings.

[0067] figure 1 It is a side view briefly showing the whole substrate processing apparatus A including the dust scattering prevention apparatuses 14A, 15A, and 16A of the present invention, figure 2 is its top view.

[0068] The substrate processing apparatus A includes: an upstream conveyance unit B that linearly conveys a substrate W to be processed in a horizontal posture from upstream to downstream; Scribing lines are processed on the back surface of the W along a direction perpendicular to the conveying direction, and the substrate W is cut along the scribing lines; and a downstream conveying unit D conveys the cut substrate W downstream. Further, a substrate supply unit E for supplying a substrate W to be processed to the upstream conveyance unit B of the substrate processi...

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PUM

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Abstract

The present invention provides a device for preventing dust scattering and substrate machining apparatus having the same capable of alleviating scattering of tiny foreign matters such as dust in a substrate processing process and thus preventing dust from adhering to the substrate and obtaining high quality product. The dust scattering preventing device (15A) of the present invention prevents scattering of dust generated at a processing portion in the substrate processing apparatus, and includes a cover (15) that covers a processing part for processing the substrate (W) in a partitioning manner; and a pressure reducing mechanism that constantly decompresses a space in the cover (15), and the pressure reducing mechanism is depressurized by a gas vacuum mechanism (19) pumping gas in a suction cover (15).

Description

technical field [0001] The present invention relates to a dust scattering preventing device used in a substrate processing device for processing a scribed line (groove) on a brittle material substrate such as glass or cutting a substrate along the scribed line, and a substrate provided with the dust scattering preventing device processing device. [0002] In particular, the present invention relates to a resin film (polyimide film (also referred to as PI film) used as a flexible substrate in the manufacturing process of a flexible OLED (Organic Light Emitting Diode: Organic Light Emitting Diode) display. ) is a dust scattering prevention device of a substrate processing device for processing a scribed line on a mother board laminated on the upper surface of a glass substrate or cutting the mother board. Background technique [0003] In the process of cutting a brittle material substrate such as a glass substrate, conventionally, a cutting wheel is pressed against the surfac...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B28D1/22B28D1/24B28D5/02B28D7/02B28D7/04C03B33/03C03B33/023
CPCC03B33/023C03B33/03B28D1/226B28D1/24B28D5/0076B28D5/0082B28D5/022B28D5/024B28D5/027B28D5/029B28D7/02B28D7/04H10K71/00H01L21/67092C03B33/033H10K71/851
Inventor 上野勉高松生芳西尾仁孝
Owner MITSUBOSHI DIAMOND IND CO LTD
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