ZrCo-based tritium storage material of film structure and preparation method
A technology of film structure and film thickness, which is applied in metal material coating process, ion implantation plating, coating, etc., can solve the problems of poor uniformity of metal tritide film composition, poor anti-disproportionation performance, poor chemical stability, etc. , to achieve the effects of high controllability of film composition and thickness, excellent anti-disproportionation performance and excellent quality
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Embodiment 1
[0033] This embodiment provides the preparation method of the ZrCo alloy-based tritium storage material with thin film structure of the present invention, specifically as follows:
[0034] Install the ZrCo alloy target on the magnetron sputtering apparatus, the power supply is 300W, the sputtering current is 70mA, the heating temperature of the sample stage is 200°C, the base distance of the target is 10cm, and the ultimate vacuum is 5×10 -6 Pa, the sputtering atmosphere is an argon atmosphere, and the gas pressure is 1Pa. A Si sheet was used as a deposition substrate, and the ZrCo-based tritium storage material with the thin film structure was obtained after sputtering for 100 min.
[0035] The ZrCo tritium storage material obtained by the deposition is annealed, the annealing temperature is 50° C., and the holding time is 300 min.
[0036] The XRD results of the thin film structure ZrCo tritium storage material obtained at last are as follows: figure 1 shown. It can be s...
Embodiment 2
[0040] This embodiment provides the preparation method of the ZrCo alloy-based tritium storage material with thin film structure of the present invention, specifically as follows:
[0041] Install the ZrCo alloy target on the magnetron sputtering apparatus, the power supply is 280W, the sputtering current is 90mA, the heating temperature of the sample stage is 700°C, the base distance of the target is 13cm, and the ultimate vacuum is 2×10 -6 , the sputtering atmosphere is an argon atmosphere, and the gas pressure is 1.5Pa. The Mo sheet was used as the deposition substrate, and the ZrCo-based tritium storage material with the film structure was obtained after sputtering for 190 minutes.
[0042] The ZrCo tritium storage material obtained by the deposition is annealed, the annealing temperature is 150° C., and the holding time is 30 minutes. The XRD results of the thin film structure ZrCo tritium storage material obtained at last are as follows: figure 1 shown. It can be see...
Embodiment 3
[0046] This embodiment provides the preparation method of the doped ZrCo alloy-based tritium storage material of the thin film structure of the present invention, specifically as follows:
[0047] Will Zr 0.75 Ti 0.25 The Co alloy target is installed on the magnetron sputtering apparatus, the power supply is 320W, the sputtering current is 60mA, the heating temperature of the sample stage is 300°C, the base distance of the target is 9cm, and the ultimate vacuum is 1×10 -5 , the sputtering atmosphere is an argon atmosphere, and the gas pressure is 2Pa. A Si sheet was used as a deposition substrate, and the ZrCo-based tritium storage material with the thin film structure was obtained after sputtering for 60 minutes.
[0048] The deposited ZrCo-based tritium storage material was annealed at a temperature of 350° C. and a holding time of 50 minutes.
[0049] The XRD results of the thin film structure ZrCo tritium storage material obtained at last are as follows: figure 1 show...
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