High-precision on-line measuring and adjusting device for holographic grating period

A technology of holographic grating and adjustment device, which is applied in the direction of measuring device, optical instrument test, optics, etc., can solve the problems of measurement accuracy discount, affecting the density and direction of moiré fringes, etc., and achieve the effect of improving accuracy and processing efficiency

Inactive Publication Date: 2019-02-22
JINAN UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

First of all, different attitudes of the reference grating will affect the density and direction of the moiré fringes, that is to say, the moiré fringes cannot directly reflect the deviation of the grating period, it is very likely to be the error of the three-dimensional attitude adjustment of the reference grating, so the measurement accuracy will be greater Second, the reference grating is used as the measurement standard, and the requirements for various indicators are very high, including its period value, grating wavefront and substrate flatness, etc.; in addition, large-area measurement requires a high-quality reference grating of the same scale, which is very difficult for large-scale gratings. Measurement is a big challenge

Method used

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  • High-precision on-line measuring and adjusting device for holographic grating period
  • High-precision on-line measuring and adjusting device for holographic grating period
  • High-precision on-line measuring and adjusting device for holographic grating period

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Embodiment 1

[0036] This embodiment discloses a high-precision online measurement and adjustment device for the period of a holographic grating, which includes: a double-beam holographic interference optical path for generating a high-density grating fringe field and capable of precise period adjustment; a reference grating and a photodetector, The reference grating is used to overlap a certain diffraction order of two beams of light to generate coaxial interference, thereby forming a stable interference field, and the photodetector is used to receive the light intensity information of the interference field; the high-precision one-dimensional mobile platform and laser interferometer System, the high-precision one-dimensional mobile platform is used to realize the movement of the grating and photodetector, and the laser interferometer is used to measure the displacement of the mobile platform with high precision; the synchronous control, data acquisition and processing system controls the ph...

Embodiment 2

[0047] The invention discloses a high-precision on-line measurement and adjustment device for the period of a holographic grating. There are various implementation methods according to the period of the holographic grating and the selection of devices.

[0048] In this embodiment, the period of the holographic grating to be measured and adjusted is 833.333 nm (1200 lines / mm), and the included angle of the holographic beam is 30.6864 degrees. The holographic light source used is a helium-cadmium laser (Kimmon, model IK4171I-G) with a wavelength of 441 nm and a laser output power of 180 mW. The incident light is divided into two beams with an energy ratio of 1:1 by the half-mirror, and then irradiated on two silver-coated mirrors, and the angle of the mirrors is adjusted to make the beams intersect symmetrically, and the included angle is close to 30.7 degrees. The filtering objective lens and the collimating lens device are symmetrically placed in the two beams, and the outgoin...

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Abstract

The invention discloses a high-precision on-line measuring and adjusting device for a holographic grating period. The device comprises a double-beam holographic interference optical path for generating and adjusting a grating field, a reference grating for generating a coaxial interference, a photoelectric detection for collecting an interference signal, a one-dimensional high-precision mobile station for scanning a holographic grating field and a laser interferometer system for measuring displacement. The device is characterized in that the reference grating is introduced into the traditionalholographic optical path to cause the coaxial interference between the two beams of coherent light; and the high-precision on-line measurement of the holographic grating field is realized by measuring the periodic variation of the interference signal; and the high-precision online adjustment of the holographic grating period is realized by the two-dimensional movement of a collimating lens.

Description

technical field [0001] The invention relates to a measuring device for a period of a holographic grating, in particular to a device for realizing high-precision on-line measurement and adjustment of a holographic interference grating field through coaxial interference and scanning detection of a reference grating. Background technique [0002] Gratings are a basic optical component. Due to their superior dispersion characteristics and light-splitting capabilities, gratings play an important role in high-energy lasers, precision measurement, 3D display, face recognition, biomedical detection, and astronomical observation. With the improvement of industrial manufacturing level and the development of scientific research, the demand for cross-scale gratings is more urgent, the size of grating processing is getting larger, and the grating density is getting higher and higher. For example, in a petawatt ultra-high power laser system, in order to achieve higher energy pulsed laser ...

Claims

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Application Information

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IPC IPC(8): G01M11/02G01M11/00G02B5/32
CPCG01M11/00G01M11/30G02B5/32
Inventor 贾伟周常河王津项长铖谢永芳赵冬薄启宇
Owner JINAN UNIVERSITY
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