GaN-based device for artificial photosynthesis and preparation method thereof
An artificial photosynthesis, gallium nitride-based technology, applied in the field of gallium nitride-based devices, can solve the problems of uneven electron collection and difficulty in improving cathode efficiency, and achieve high electron-hole separation efficiency, reduced emissions, and high absorption coefficient Effect
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[0016] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0017] refer to figure 1 , the GaN-based device for artificial photosynthesis of the present invention has a metal substrate (Cu, In, Sn, Ag, Au, Pb, or Cd, etc.), n + - GaN layer, InGaN layer.
[0018] Its preparation method is as follows:
[0019] 1) On the clean n-type heavily doped gallium nitride layer, the InGaN epitaxial layer is grown by molecular beam epitaxy to obtain n + -GaN / InGaN structure;
[0020] 2) the above n by a bonding machine + -GaN / InGaN structures bonded on metal substrates, either using flip-chip technology or using conductive adhesives to obtain n + -GaN / InGaN structure bonded to the metal substrate, making n + -GaN is in contact with metal and the contact resistance of the contact interface is less than 1x10 -4 Ωcm 2 ; Get device. Excessive contact resistance is not conducive to the transport of holes and ele...
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