Nanometer silicon/monocrystalline silicon heterojunction radial nanowire solar cell and preparation method thereof

Abstract

The invention relates to a solar cell, in particular to a nanowire solar cell which has a heterojunction radial structure and is formed by monocrystalline silicon, nanometer silicon and aluminum oxide. The cell structure is a cell structure of n-type monocrystalline silicon / p-type nanometer silicon / aluminum oxide or n-type monocrystalline silicon / i-type nanometer silicon / p-type nanometer silicon / aluminum oxide. In the nanowire solar cell, a monocrystalline silicon (c-Si) nanowire is prepared on a n-type monocrystalline silicon substrate by a wet etching process, and hydrogenated i-type and p-type nanometer silicon (nc-Si:H) membranes are prepared on a monocrystalline nanowire by a plasma enhanced chemical vapor deposition (PECVD) method to form a radial structure of c-Si(n) / nc-Si:H(p) orc-Si(n) / nc-Si:H(i) / nc-Si:H(p) from inside to outside; an Al2O3 layer is prepared by an atomic layer deposition (ALD) technology, and an aluminum-doped zinc oxide layer is prepared by the ALD technology; and finally, an aluminum electrode is subjected to vacuum evaporation on the reverse side of the n-type monocrystalline silicon, and is annealed quickly to prepare the silicon-based nanowire solarcell. By the preparation method, the high-efficiency silica-based nanowire solar cell can be prepared, and low-quality monocrystalline silicon materials can be utilized, so the cost of the cell can be reduced.

Description

technical field [0001] The invention relates to a solar cell, in particular to a heterojunction radial structure nanowire solar cell formed by using monocrystalline silicon, nano-silicon and alumina, and the cell structure is n-type monocrystalline silicon / p-type nano-silicon / alumina or n-type Cell structure of monocrystalline silicon / i-type nano-silicon / p-type nano-silicon / alumina. Background technique [0002] Silicon solar cells occupy a dominant position in the commercial solar cell market due to abundant silicon raw materials, mature technology, stable performance, and less environmental pollution; at present, various anti-reflection coatings and silicon surface texturing technologies are used to improve the optical properties of cells It is still an important way to improve the performance of solar cells; in addition, various new nanostructures that have emerged in the field of microelectronics in the past decade are expected to realize the first generation of solar ce...

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Problems solved by technology

[0004] Generally speaking, using low-quality silicon materials to make radial silicon nanowire solar cells is beneficial to improve light absorption, improve cell efficiency, and reduce cell material costs, but At present, the research on Si-based nanowire solar cells is still in the laboratory stage, and the efficiency is low, about 5%. Most of the research is to form nanowires on the silicon substrate by various methods, and then form a pn cell structure by diffusion ; or outside the silicon nanowires, the vapor phase chemical deposition method is used to prepare an amorphous silicon film to form a pin cell structure. Although the radial p-n junction is beneficial to the collection of carriers and is theoretically expected to have a higher conversion efficiency, High surface recombination rate and poor electrode contact contribute to low efficiency of nanowire batteries

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