A large-size substrate evaporation device and a method for preparing CDTE solar coatings using the evaporation device

A large-scale, evaporation technology, applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of high maintenance cost, low controllability, and large environmental impact, and achieve large-scale The effect of production and improvement of uniformity

Active Publication Date: 2020-11-03
YANCHUANG APPLIED MATERIALS GANZHOU CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But these preparation methods all have certain defectives, mainly show in: (1) the waste liquid that water-bath method produces, not only discharge amount is big simultaneously in the processing cost of environmental safety and security aspect is higher and has very big impact on environment; (2) uses The film is prepared by sputtering, and the controllability of the target composition is low. At the same time, in the process of depositing the film, sputtering damage is easy to occur on the film surface; (3) when using the co-evaporation method, it is necessary to consider the working distance Larger coating area can be effectively obtained only when placed at an angle, but the composition uniformity is poor, the material yield is low (<30%), and the maintenance cost is high, so it cannot be used in mass production
[0004] So far, no effective large-area evaporation and low-cost method has been proposed

Method used

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  • A large-size substrate evaporation device and a method for preparing CDTE solar coatings using the evaporation device
  • A large-size substrate evaporation device and a method for preparing CDTE solar coatings using the evaporation device
  • A large-size substrate evaporation device and a method for preparing CDTE solar coatings using the evaporation device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] The method for preparing a CdTe solar coating film based on the large-scale substrate evaporation device proposed by the present invention comprises the following steps:

[0036] S1. Put cadmium element and tellurium element with a purity greater than 99.99% into the upper crucible 6 and the lower crucible 7 respectively, wherein the upper crucible is a tantalum crucible, and the lower crucible is a stainless steel crucible;

[0037] S2. Place the vapor deposition box 1 in the vapor deposition chamber of the vapor deposition machine, and use a vacuum pumping system to pump the background pressure of the vapor deposition chamber to 5×10 -6 torr;

[0038] S3. First heat the temperature in the sandwich box body 4 to 830°C, then heat the cadmium element in the upper crucible 6 to 530°C, and heat the tellurium element in the lower crucible 7 to 730°C, so that the cadmium element and tellurium element The forms of steam are gathered on the flexible stainless steel substrate ...

Embodiment 2

[0040] The method for preparing a CdTe solar coating film based on the large-scale substrate evaporation device proposed by the present invention comprises the following steps:

[0041] S1. Put cadmium element and tellurium element with a purity greater than 99.99% into the upper crucible 6 and the lower crucible 7 respectively, wherein the upper crucible is a tantalum crucible, and the lower crucible is a stainless steel crucible;

[0042] S2. Place the vapor deposition box 1 in the vapor deposition chamber of the vapor deposition machine, and use a vacuum pumping system to pump the background pressure of the vapor deposition chamber to 5×10 -6 torr;

[0043] S3. First heat the temperature in the sandwich box body 4 to 830°C, then heat the cadmium element in the upper crucible 6 to 610°C, and heat the tellurium element in the lower crucible 7 to 730°C, so that the cadmium element and tellurium element The forms of steam are gathered on the flexible stainless steel substrate ...

Embodiment 3

[0045] The method for preparing a CdTe solar coating film based on the large-scale substrate evaporation device proposed by the present invention comprises the following steps:

[0046] S1. Put cadmium element and tellurium element with a purity greater than 99.99% into the upper crucible 6 and the lower crucible 7 respectively, wherein the upper crucible is a tantalum crucible, and the lower crucible is a stainless steel crucible;

[0047] S2. Place the vapor deposition box 1 in the vapor deposition chamber of the vapor deposition machine, and use a vacuum pumping system to pump the background pressure of the vapor deposition chamber to 5×10 -6 torr;

[0048] S3. First heat the temperature in the sandwich box body 4 to 830°C, then heat the cadmium element in the upper crucible 6 to 780°C, and heat the tellurium element in the lower crucible 7 to 730°C, so that the cadmium element and tellurium element The forms of steam are gathered on the flexible stainless steel substrate ...

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Abstract

The invention provides a large-sized substrate evaporation apparatus and a method of using the same to prepare CdTe solar coating. The large-sized substrate evaporation apparatus comprises an evaporation tank; a thermal barrier device is fixed in the evaporation tank; a coating substrate is fixed to the inner top wall of the evaporation tank; a sandwich box body and an upper crucible are fixed inthe thermal barrier device; a first steam passage that is cyclic is arranged around the thermal barrier device; the inside of the sandwich box body is provided with a second steam passage; a heater isfixed to the bottom wall of the sandwich box body; a heater is also fixed below the upper crucible; a lower crucible is arranged right below the evaporation tank; a heater is fixed right below the lower crucible. The large-sized substrate evaporation apparatus is applicable to the preparation of CdTe solar coating and other various binary or multi-element compound material coatings; the composition of coatings can be precisely controlled; coating uniformity can be improved.

Description

technical field [0001] The invention relates to the technical field of preparation of thin-film solar cells, in particular to a large-size substrate evaporation device and a method for preparing a CdTe solar coating by using the evaporation device. Background technique [0002] Thin-film solar cell is a kind of solar cell. It has the advantages of less material consumption and strong comprehensive power generation capacity. It can be combined with buildings or become a part of buildings, and has a wide range of applications. According to the difference of materials used in the photoelectric conversion layer, thin-film solar cells can be mainly divided into silicon-based thin-film solar cells, cadmium telluride (CdTe) thin-film solar cells and copper indium gallium selenide (CIGS) thin-film solar cells. Among them, CdTe thin-film solar cells have become one of the most popular thin-film solar cells because of their high light absorption rate, high conversion efficiency, stabl...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24C23C14/06
CPCC23C14/0021C23C14/0623C23C14/24
Inventor 宋寰欣黄信二
Owner YANCHUANG APPLIED MATERIALS GANZHOU CO LTD
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