A large-size substrate evaporation device and a method for preparing CDTE solar coatings using the evaporation device
A large-scale, evaporation technology, applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of high maintenance cost, low controllability, and large environmental impact, and achieve large-scale The effect of production and improvement of uniformity
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Embodiment 1
[0035] The method for preparing a CdTe solar coating film based on the large-scale substrate evaporation device proposed by the present invention comprises the following steps:
[0036] S1. Put cadmium element and tellurium element with a purity greater than 99.99% into the upper crucible 6 and the lower crucible 7 respectively, wherein the upper crucible is a tantalum crucible, and the lower crucible is a stainless steel crucible;
[0037] S2. Place the vapor deposition box 1 in the vapor deposition chamber of the vapor deposition machine, and use a vacuum pumping system to pump the background pressure of the vapor deposition chamber to 5×10 -6 torr;
[0038] S3. First heat the temperature in the sandwich box body 4 to 830°C, then heat the cadmium element in the upper crucible 6 to 530°C, and heat the tellurium element in the lower crucible 7 to 730°C, so that the cadmium element and tellurium element The forms of steam are gathered on the flexible stainless steel substrate ...
Embodiment 2
[0040] The method for preparing a CdTe solar coating film based on the large-scale substrate evaporation device proposed by the present invention comprises the following steps:
[0041] S1. Put cadmium element and tellurium element with a purity greater than 99.99% into the upper crucible 6 and the lower crucible 7 respectively, wherein the upper crucible is a tantalum crucible, and the lower crucible is a stainless steel crucible;
[0042] S2. Place the vapor deposition box 1 in the vapor deposition chamber of the vapor deposition machine, and use a vacuum pumping system to pump the background pressure of the vapor deposition chamber to 5×10 -6 torr;
[0043] S3. First heat the temperature in the sandwich box body 4 to 830°C, then heat the cadmium element in the upper crucible 6 to 610°C, and heat the tellurium element in the lower crucible 7 to 730°C, so that the cadmium element and tellurium element The forms of steam are gathered on the flexible stainless steel substrate ...
Embodiment 3
[0045] The method for preparing a CdTe solar coating film based on the large-scale substrate evaporation device proposed by the present invention comprises the following steps:
[0046] S1. Put cadmium element and tellurium element with a purity greater than 99.99% into the upper crucible 6 and the lower crucible 7 respectively, wherein the upper crucible is a tantalum crucible, and the lower crucible is a stainless steel crucible;
[0047] S2. Place the vapor deposition box 1 in the vapor deposition chamber of the vapor deposition machine, and use a vacuum pumping system to pump the background pressure of the vapor deposition chamber to 5×10 -6 torr;
[0048] S3. First heat the temperature in the sandwich box body 4 to 830°C, then heat the cadmium element in the upper crucible 6 to 780°C, and heat the tellurium element in the lower crucible 7 to 730°C, so that the cadmium element and tellurium element The forms of steam are gathered on the flexible stainless steel substrate ...
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