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Based on al/m x o y Interdigital Structure Transducer with Energetic Thin Film

An interdigitated structure and interdigitated technology, which is applied in the field of interdigitated structure transducers, can solve the problems of damage to the lower grain column and complex structure.

Active Publication Date: 2021-07-06
NANJING UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Explosive foil has high safety, anti-static, anti-radio frequency, no contact between agent and bridging membrane, and can meet the requirements of 500V non-igniting in-line pyrotechnics. The powder column is damaged, attenuation elements need to be added, and the structure is complicated

Method used

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  • Based on al/m <sub>x</sub> o <sub>y</sub> Interdigital Structure Transducer with Energetic Thin Film
  • Based on al/m <sub>x</sub> o <sub>y</sub> Interdigital Structure Transducer with Energetic Thin Film
  • Based on al/m <sub>x</sub> o <sub>y</sub> Interdigital Structure Transducer with Energetic Thin Film

Examples

Experimental program
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Effect test

Embodiment 1

[0033] Example 1: Transducer with rectangular interdigitated structure

[0034] Such as Figure 1~3 As shown, the rectangular interdigitated structure transducer element includes 1 μm SiO on the surface 2 Si substrate 1 of layer 2, Al thin film electrode 3 and M x o y The dielectric layer 4 as a whole includes two parts, the pad and the bridge area, the size of which is 1.7mm*1.5mm, and the size of the bridge area is 1.0mm*1.5mm. Among them, the interfingers of the Al thin film electrode 3 have a width of 0.025 mm, a distance of 0.025 mm, and a length of 0.8 mm (0.2 mm is reserved for the edge of the electrode at the other end to prevent breakdown of the edge of the electrode). Both ends of the bridge area are pads for connecting to an external excitation power supply. The thickness of Al thin film electrode is 500nm, M x o y The dielectric layer is 800nm.

[0035] The electric explosion transducer element can be applied to the ignition of electric pyrotechnics, and can...

Embodiment 2

[0036] Embodiment 2: Circular interdigitated structure transducer element

[0037] Such as Figure 4~6 As shown, the circular interdigitated structure transducer element includes 1 μm SiO on the surface 2 Si substrate 1 of layer 2, Al thin film electrode 3 and M x o y Dielectric layer 4. The whole includes two parts, the pad and the bridge area, the size is 1.7mm*1.5mm, and the size of the bridge area is a circle with R=0.45mm. The center of the bridge area is a circle with a diameter of 0.075mm, the distance between the rings of the ring fingers of the Al thin film electrode 3 is 0.025mm, the width of the ring electrode is 0.025mm, and the two ends of the electrode are semicircular rounded corners with a diameter of 50nm. The pads at both ends are 3mm*4mm respectively, and are connected to an external excitation power supply. The thickness of Al thin film electrode is 500nm, M x o y The thickness of the dielectric layer is 800nm.

[0038] with Al / M x o y Compared wi...

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Abstract

The invention discloses an Al / M-based x O y The interdigitated structure transducer element of the energy-containing film, which consists of SiO on the surface 2 Si substrate, Al thin film electrode and M x O y The composition of the dielectric layer, using metal Al as the interdigital electrode, and depositing M on the interdigital electrode x O y The dielectric layer acts as an insulating medium between the interdigital electrode gaps. The invention significantly improves the safety, applicability and ignition ability of the electric explosion transducer element, the critical excitation voltage of the transducer element can be adjusted in a wide range, meets the requirements of different ignition tasks, and can achieve the requirement of no ignition at 500V. In addition, the transducer element uses the MEMS fabrication process, which is easy to integrate with other components and improves the integration of the pyrotechnic devices.

Description

technical field [0001] The invention relates to the field of basic ignition elements of electrical explosives, in particular to an Al / M-based x o y Interdigital structure transducer element with energetic thin film. Background technique [0002] As ignition and detonation components, electrotechnical products are an indispensable part of equipment and devices such as weapons, aviation, aerospace, ships, and motor vehicles. They are widely used in ammunition for various guns, rocket engine ignition systems, and opening And separation actuators, emergency lifesaving devices, satellite unlocking systems, etc., the safety and reliability of pyrotechnics are also directly related to the safety and reliability of the entire system, which puts forward higher requirements for pyrotechnics. [0003] The bridge wire type electric explosive device is the most widely used explosive device at present. Its working principle is: the electric current passes through the bridge wire, genera...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F42B3/13B81B7/02B81C1/00
CPCB81B7/02B81C1/00349B81C1/00539F42B3/13
Inventor 沈瑞琪马宏玲付帅朱朋陈楷
Owner NANJING UNIV OF SCI & TECH