Axicon cone angle detection device and method based on non-diffracting light moiré fringes
A detection method, a technology without diffracted light, which is applied in the field of optical detection and can solve problems such as inaccurate measurement results
Active Publication Date: 2021-07-06
HUBEI UNIV OF TECH
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However, the influence of different wavelengths on the focal length of the imaging lens is ignored, resulting in inaccurate measurement results
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[0017] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0018] figure 1 It shows the structural principle diagram of the axicon cone angle detection device based on the non-diffraction light moiré fringe. The detection device includes a light source 1, and an optical filter 2, a double hole screen 4, The axicon 5 and the image sensor 6, the tapered surface of the axicon 5 faces the image sensor 6, and the axicon 5 can rotate freely around its central axis. The light source 1 can be a white light source; the filter 2 for passing through a fixed wavelength is placed in parallel in the shading plate 3 as a whole, and the shading plate 3 is used to block stray light; the double-hole screen 4 is used for light splitting; the axicon 5 is Axicon mirrors for cone angles to be measured for generating non-diffracting light. The light beam emitted by the light source 1 is filtered by the filter 2 a...
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The invention discloses an axicon cone angle detection device and method based on Moiré fringes of non-diffracted light. The detection device includes a light source, and a filter, a double-aperture screen, an axicon and an image sensor are sequentially arranged along the direction of the outgoing beam of the light source. The filter is placed in parallel in the light shield, and the cone of the axicon faces the image sensor. The light beam emitted by the light source is filtered by a filter and projected onto the double-hole screen. The beam is split by the double-hole screen to form two beams incident on the plane of the axicon. Each beam passes through the axicon and converges to the axis based on its axis. At different points, non-diffracted light is formed, and the image sensor collects the interference pattern of the two channels of non-diffracted light. According to the center position of the two concentric rings formed behind the axicon by the two channels of non-diffracted light, and the two concentric The axicon angle of the axicon is calculated from the number of moire fringes formed by the overlapping interference of the rings.
Description
technical field [0001] The invention relates to the field of optical detection, in particular to an axicon cone angle detection device and method based on non-diffraction light Moiré fringes. Background technique [0002] The axicon is a rotationally symmetrical pyramidal optical element. Due to its long focal depth and narrow lateral width, it is widely used in laser beam shaping, laser drilling, optical inspection, laser resonator, and non-diffraction beam generation. etc. In the projection lithography machine, the axicon mirror can convert the traditional lighting mode into a ring lighting mode, and is one of the core components of its lighting system. It is necessary to accurately detect the size of its cone angle during processing. [0003] Prior art [1] (M.de Angelis, S.De Nicola, P.Ferraro, et al. "Test of aconical lens using a two-beam shearing interferometer", Opt Laser Eng.39:155-163(2003) .) Diffractive cone lenses are inspected using a two-beam shearing interfe...
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IPC IPC(8): G01B11/26
CPCG01B11/26
Inventor 杨练根刘凡冉晶晶罗雅梅李劲松黄娇洁
Owner HUBEI UNIV OF TECH