Method and system for detecting adjacent splicing mirrors
A detection method and imaging system technology, applied in the field of optics, can solve problems such as difficult splicing and alignment of splicing mirrors, and achieve the effects of convenient disassembly and maintenance, strong feasibility, and simple structure
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Embodiment 1
[0041] According to an embodiment of the present invention, a method for detecting adjacent spliced mirrors is provided, which is suitable for confocal / co-phase of spliced mirrors, see figure 1 , including the following steps:
[0042] S101: dividing the coherent light source into two parallel light beams with a preset optical path difference;
[0043] S102: the two parallel beams are respectively incident on two adjacent splicing mirrors for reflection;
[0044] S104: interfere with the reflected two parallel beams to generate interference fringes;
[0045] S106: Calculate the parameter information between two adjacent splicing mirrors from the interference fringe information.
[0046] In the method for detecting adjacent splicing mirrors in the embodiment of the present invention, the parameter information between two adjacent splicing mirrors is calculated from the interference fringe information, and the parameter information between the two adjacent splicing mirrors...
Embodiment 2
[0055] According to another embodiment of the present invention, see Figure 4 , provides an adjacent splicing mirror detection system, including:
[0056] Laser 1, used to generate a coherent light source;
[0057] a beam splitter, which is used for dividing the coherent light source into two parallel beams with a preset optical path difference and incident on two adjacent splicing mirrors for reflection;
[0058] The beam interferometer is used to generate interference fringes by interfering the reflected two parallel beams;
[0059] The parameter calculation unit is used to calculate the parameter information between two adjacent splicing mirrors from the interference fringe information.
[0060] As a preferred technical solution, the beam splitter includes: a right-angled triangular prism 3, a parallelogram prism 5, the right-angled triangular prism 3 is glued and connected with a parallelogram prism 5 whose angle is complementary to it, and the glue layer 4 realizes sem...
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