Gus-Hansen displacement spr sensor based on m-z interference structure
An interference structure, M-Z technology, applied in the field of optical sensing, can solve the problems of limited Gus-Hansen displacement SPR sensor, etc., and achieve the effect of improving detection limit, detection accuracy, stability and signal-to-noise ratio
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[0017] Below in conjunction with accompanying drawing, the present invention is described in further detail:
[0018] The present invention includes laser 1, polarization beam splitter prism 2, 3, SPR sensor module 6, beam splitter 7, 11, plane reflector 4, 5, 9, 10, wedge-shaped substrate 8, polarizer 12, light intensity detector 13 , the light emitted by the laser 1 is divided into two independent beams of TM light and TE light by the combination of the polarization beam splitter prism 2, 3 and the plane mirror 4, 5, and after passing through the sensing detection part SPR sensor module 6, the TM light is generated Goose-Hansen shift, through the combination of beam splitters 7, 11, plane mirrors 9, 10 and wedge-shaped substrate 8, transforms Goose-Hansen shift into optical path difference, and makes TM light and TE light interfere respectively. By controlling the polarization angle of the polarizer 13 to read the interference light intensity of the TM light and the TE light...
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