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Line source device and OLED evaporation machine

A line source and evaporation technology, which is applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of easy pollution and time-consuming opening of the cavity, so as to reduce the opening time, reduce pollution, reduce Effect of equipment feed time

Inactive Publication Date: 2019-03-19
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The embodiment of the present application provides a high-efficiency line source device and an OLED evaporation machine to solve the technical problems that the existing line source device takes a long time when adding evaporation materials during the vacuum evaporation process and is easily polluted when opening the cavity.

Method used

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  • Line source device and OLED evaporation machine
  • Line source device and OLED evaporation machine
  • Line source device and OLED evaporation machine

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Embodiment Construction

[0042] Please refer to the drawings in the accompanying drawings, wherein like reference numerals refer to like components. The following description is based on illustrated specific embodiments of the present application, which should not be construed as limiting other specific embodiments of the present application that are not described in detail here.

[0043] Please refer to figure 1 , figure 1 It is a schematic structural diagram of an embodiment of the line source device of the present application. The line source device 100 of the embodiment of the present application includes a line source mechanism 10 and at least two crucible mechanisms 20 .

[0044] The line source mechanism 10 is used for sputtering gaseous organic materials onto the external TFT substrate. The line source mechanism 10 includes a line source cavity 11 . The crucible mechanism 20 is used to provide gaseous organic material. Each crucible mechanism 20 is arranged outside the line source mechani...

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Abstract

The invention provides a line source device and an OLED evaporation machine. The line source device comprises a line source mechanism and at least two crucible mechanisms, wherein the line source mechanism comprises a line source cavity body; each crucible mechanism is arranged at the outer side of the line source mechanism, and each crucible mechanism comprises a crucible cavity body and a connection valve; and each connection valve is arranged between each crucible cavity body and the line source cavity body, and used for isolating the crucible cavity body from the line source cavity body orcommunicating the crucible cavity body with the line source cavity body. According to the line source device and the OLED evaporation machine, through the arrangement for the at least two crucible mechanisms, the use efficiency of the equipment is increased, and the charging time of the equipment is reduced.

Description

technical field [0001] The present application relates to an organic electroluminescence display technology, in particular to a line source device and an OLED evaporation machine. Background technique [0002] The key to OLED (Organic Light Emitting Diode, Organic Light Emitting Diode) display process is to fill organic light-emitting materials into TFT (Thin Film Transistor, Thin Film Transistor) substrate pixels. Organic materials are heated and evaporated to the pixels of the TFT substrate. Mass production of red, green and blue light-emitting film materials usually use a linear evaporation source and a linear crucible. The line source and the crucible are designed in a rectangular parallelepiped shape. The outermost is a linear source, and the inner design is a heating wire. , The crucible is installed inside the line source, the organic material is installed inside the crucible, the crucible is added with a crucible cover, and there is a nozzle on the crucible cover, an...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C23C14/56
CPCC23C14/243C23C14/56
Inventor 魏锋
Owner SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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