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Titanium alloy piezoresistive pressure sensor pedestal and manufacturing method thereof

A pressure sensor, piezoresistive technology, applied in the direction of fluid pressure measurement, measurement of fluid pressure, instruments, etc. by changing ohmic resistance, to achieve the effect of expanding the scope of application, good corrosion resistance, and improving service life

Pending Publication Date: 2019-03-26
XIAN SEAL ELECTRONICS MATERIAL TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, titanium alloy and Kovar alloy are difficult to be directly sealed with sealing glass.

Method used

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  • Titanium alloy piezoresistive pressure sensor pedestal and manufacturing method thereof

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Embodiment Construction

[0026] Below in conjunction with accompanying drawing and embodiment the present invention is described in further detail:

[0027] Such as figure 1 As shown, the titanium alloy piezoresistive pressure sensor base includes a housing 1, a stepped cermet 2, a sealing glass 3, brazing solder 4 and an iron-nickel alloy lead 5, the housing 1 is cylindrical, and the housing The inside of 1 is stepped and hollow, and the stepped cermet 2 is arranged inside the casing 1. Two circles of brazing sealing holes 6 are arranged on the inner wall of the casing 1, and the brazing solder 4 covers the The upper and lower parts of the stepped cermet 2 are located inside the brazing sealing hole 6, and the inside of the stepped cermet 2 is provided with two glass sealing holes 7, and the sealing glass 3 is provided Inside the glass sealing hole 7 , the sealing glass 3 is provided with the iron-nickel alloy lead wire 5 .

[0028] In this embodiment, a rectangular groove 8 is arranged on the oute...

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Abstract

The invention belongs to the field of cermet brazing and sealing, and specifically relates o a titanium alloy piezoresistive pressure sensor pedestal and a manufacturing method thereof. The titanium alloy piezoresistive pressure sensor pedestal comprises a housing, stepped cermet, sealing glass, brazing solder and an iron-nickel alloy lead, wherein the housing is cylindrical, the internal part ofthe housing is stepped hollow, the stepped cermet is arranged inside the housing, the inner wall of the housing is provided with two circles of brazing and sealing holes, the brazing solder covers theupper part and the lower part of the stepped cermet and is located inside the brazing and sealing holes, the stepped cermet is internally provided with two glass sealing holes, the sealing glass is arranged inside the glass sealing holes, and the iron-nickel alloy lead is arranged inside the sealing glass.

Description

technical field [0001] The invention belongs to the field of cermet brazing and sealing, and in particular relates to a titanium alloy piezoresistive pressure sensor base and a manufacturing method thereof. Background technique [0002] At present, in the field of sensors, the main material of the piezoresistive pressure sensor base is SUS316L, and Kovar alloy is used as the inner conductor pin. However, in actual use, the deterioration of the working environment often leads to short service life and equipment failure. The piezoresistive pressure sensor with titanium alloy as the base material works in humid atmosphere and seawater medium, and its corrosion resistance It is far superior to stainless steel products, has strong resistance to pitting corrosion, acid corrosion, and stress corrosion, and has excellent corrosion resistance to alkali, chloride, chlorine organic substances, nitric acid, sulfuric acid, etc., which can meet various working conditions. use. Titanium ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/06G01L19/06G01L19/14
CPCG01L9/06G01L19/0627G01L19/14
Inventor 郑浩楠高军王宇飞赵红刚贾波
Owner XIAN SEAL ELECTRONICS MATERIAL TECH CO LTD