Two-dimensional piezoelectric motor using relative friction to reduce resistance and control method thereof
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
- Publication Date
- 2019-03-26
Smart Images

Figure 1 
Figure 2 
Figure 3
Abstract
Description
technical field
[0001] The invention relates to a two-dimensional piezoelectric stepper, in particular to a two-dimensional piezoelectric motor which utilizes opposite friction to reduce driving resistance, and belongs to the technical field of piezoelectric positioners. Background technique
[0002] Due to its advantages of small size, high precision, and self-locking when power is off, piezoelectric motors are used in various fields that require precise positioning, such as optical focusing, micro-electromechanical product processing, etc. However, piezoelectric motors tend to output less thrust than conventional electromagnetic motors. To achieve wide application, it is still necessary to increase its own thrust while ensuring high precision and high rigidity.
[0003] In order to increase the thrust, we proposed and implemented a five-piezoelectric body stack piezoelectric motor in 2014, which is pressed by opposing friction force. For details, see the American scientif...