Miniature involute type vortex vacuum dry pump

Abstract

The invention discloses a miniature involute type vortex vacuum dry pump. The miniature involute type vortex vacuum dry pump comprises a motor, a main shaft, a vortex plate left stator, a vortex plateright stator, a vortex plate rotor, a middle pump cavity and the like, wherein the main shaft adopts an integrated mode with a motor shaft, the vortex plate rotor is arranged on an eccentric sectionof the main shaft in a sleeved mode, vortex bodies are all machined on the left stator, the right stator and the rotor, and the vortex bodies are meshed with one another, so that a plurality of air suction channels are formed, and then an air suction function is achieved. Compared with the prior art, a secondary air suction mechanism is provided, through the compact design, the pumping speed rangeof a traditional vortex vacuum pump is broken through, and the size of the pump is remarkably reduced; through a sealing element, a limiting device, an exhaust valve assembly and the like, the operation reliability of the whole machine is improved, and the compression ratio of the pump is increased.

Description

technical field [0001] The invention belongs to the field of dry vacuum suction pumps, in particular to a miniature involute scroll vacuum dry pump. Background technique [0002] Scroll vacuum pumps are non-contact dry pumps. The scroll theory was first applied to scroll compressors. With the rapid development of industries such as semiconductors, new materials and biopharmaceuticals, the scroll theory continues to mature and people are more concerned about the cleanliness of the vacuum environment. Due to the urgent requirement of oil, the scroll theory has been successfully applied to the design and manufacture of vacuum pumps. Compared with traditional vacuum pumps, scroll vacuum pumps have the characteristics of no oil, clean, low vibration and noise, and low energy consumption. Most analytical instruments and testing equipment, such as mass spectrometers, leak detectors, etc., require a certain vacuum environment to realize their functions. With the increasing portabili...

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Problems solved by technology

[0003] Well-known vacuum equipment manufacturers at home and abroad have all carried out research on dry scroll vacuum pumps. At present, the research is mainly concentrated on the following two aspects: 1. The development of high pumping speed scroll pumps is carried out. At present, the maximum pumping speed of scroll pumps does not exceed 20L / s, in order to further adapt to the increasingly stringent reliability and stability requirements of the semiconductor process and broaden the scope of application of the scroll pump, major companies have conducted research on the materials and manufacturing processes of the scroll, and are expected to develop a large pump of 32L / s Pumping speed pump; 2. Compared with the high pumping speed, the research and development of small scroll pumps has just started, the current minimum pumping speed is 1L / s, but the volume of the whole machine still does not meet the miniaturization trend of high-tech scientific instruments, so the development It is imperative to develop miniaturized vortex pump

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