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Laser beam polishing method of fused quartz optical glass

An optical glass and laser polishing technology, which is applied in laser welding equipment, metal processing equipment, welding equipment, etc., can solve the problems of residual stress limiting the practical application of laser polishing fused silica optical glass technology, residual thermal stress, etc., and achieve the elimination of residual heat stress, overcome uneven heat accumulation, and solve the effect of expensive and inefficient polishing

Inactive Publication Date: 2019-04-09
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] However, CO2 laser polishing of fused silica optical glass is a thermal process, and the polished quartz optical glass will inevitably have residual thermal stress
If the problem of residual stress is not solved, it will directly limit the practical application of laser polishing fused silica optical glass technology

Method used

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  • Laser beam polishing method of fused quartz optical glass
  • Laser beam polishing method of fused quartz optical glass

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Embodiment 1

[0016] A laser beam polishing method for fused silica optical glass, comprising the following steps:

[0017] 1) Preparation of fused silica optical glass components before polishing: Polish the fused silica optical glass components with traditional polishing methods, then clean the fused silica optical glass with the optical component cleaning method to ensure that the surface of the components is clean and free of impurities, and then clean the fused silica optical glass Glass components are placed on a clean polished platform. The diameter of fused silica optical glass is 30mm, the thickness is 3mm, and the surface roughness before laser beam polishing is 0.229nm (using atomic force microscope, the detection area size is 1×1μm 2 ), the maximum stress before polishing is 4nm / cm;

[0018] 2) Polishing parameter setting and path planning: In the polishing control software, continuous CO 2 Laser light source. Polished fused silica glass can choose a one-way round-trip scanni...

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Abstract

The invention provides a polishing method of fused quartz optical glass. According to the method, the fused quartz optical glass is polished by continuous CO2 laser beams, laser beam polishing of thefused quartz optical glass with the surface of which the roughness RMS is less than 0.2 nm is realized by combining a nonfocusing light source with a temperature monitoring and feedback system, and almost no microdefect and scratch exist on the surface of the polished fused quartz optical glass. The method comprises an annealing step, and can eliminate the thermal residual stress caused by laser beam polishing. The invention provides a novel method for processing fused quartz optical glass with a nondestructive super-smooth surface.

Description

technical field [0001] The invention relates to the polishing of fused silica optical glass, in particular to a laser beam polishing method of fused silica optical glass. Background technique [0002] At present, the commonly used processing and polishing methods for fused silica optical glass at home and abroad mainly include grinding, grinding and polishing technology, forming processing technology, ultra-precision turning technology, etc. These processing methods solve the processing requirements of fused silica optical glass components to a certain extent , but there are still many deficiencies. The processing technology based on grinding and lapping will inevitably cause surface and subsurface damage to the components during the processing process. The injection of auxiliary materials such as polishing powder / liquid will introduce impurities on the surface of the components. Problems such as IF waviness residue are difficult problems to overcome. The new computer-cont...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/00B23K26/402B23K26/60B23K26/70
CPCB23K26/402B23K26/60B23K26/702
Inventor 邵建达贺婷魏朝阳郭梦婷蒋志刚
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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