Telecentric F-Theta scanning lens for high-precision laser processing
A laser processing and scanning lens technology, which is applied in optics, optical components, instruments, etc., can solve the problems of increased difficulty in lens development and assembly, large optical lenses, and difficult F-Theta linearity.
Inactive Publication Date: 2019-04-16
淄博海泰新光光学技术有限公司
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Problems solved by technology
The telecentric field lens has the characteristics of large field of view and difficult distortion correction, and the optical lens required by the telecentric structure is large, so the difficulty of lens development and assembly will increase, and the F-Theta can be fully guaranteed while maintaining the telecentric structure. Linearity is particularly difficult. The current design structure of laser scanning lens products on the market compromises on telecentric structure and linear distortion correction, resulting in reduced uniformity of full-frame light spots.
[0004] With the continuous development of laser processing technology, the requirements for laser processing equipment are getting higher and higher. Scanning field mirrors with high spot roundness consistency and reasonable distortion control are particularly important in laser processing. Precision laser processing requires edge processing within the processing range. The size of the regional hole or the width of the cutting slit is consistent with the processing effect at the center position. The ordinary F-Theta lens cannot meet this requirement, and a high-precision telecentric structure F-Theta scanning lens is required for processing
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[0020] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0021] Embodiment The technical scheme and working principle of the present invention are illustrated by the core optical system of an F-Theta ultraviolet 355nm telecentric scanning lens with a field of view angle of 20° and an entrance pupil diameter of 9. The embodiment has exactly the same structure as the summary of the invention, and to avoid repetition, only key data are listed.
[0022] The schematic diagram of the optical system structure of the ultraviolet 355nm telecentric F-Theta scanning field mirror is as follows figure 1 As shown, in order to achieve the design target requirements, 6 pieces of fused silica lenses are used, and the lenses adopt the focal power distribution of "+--+++". Starting from the laser incident direction, it includes the first lens L1 with focal length f1, the second lens L2 with focal length f2, the thir...
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The invention discloses a telecentric F-Theta scanning field lens for high-precision laser processing. The telecentric F-Theta scanning lens includes a first lens L1 having a focal length f1, a secondlens L2 having a focal length f2, a third lens L3 having a focal length f3, a fourth lens L4 having a focal length f4, a fifth lens having a focal length f5 L5, and a sixth lens L6 having a focal length f6 which are distributed sequentially from a laser incident direction; and the total focal length of the objective lens is f. The scanning field lens of the present invention is arranged in a +--+++ focal power distribution mode. Compared with the prior art, the scanning field lens has high uniformity in full-format spot size and maintains good convergence under a premise of ensuring strict F-Theta linearity. The F-Theta lens of the present invention is particularly suitable for high-precision laser processing application such as cutting and drilling.
Description
technical field [0001] The invention relates to a laser processing scanning lens, in particular to a high-precision laser processing telecentric F-Theta scanning lens. Background technique [0002] Flat-field scanning lens (F-Theta lens) For monochromatic light imaging, in laser scanning, negative distortion is used to change the imaging, so that the scanning speed is linearly related to the imaging speed, and its image plane is a plane, requiring the entire image plane The image quality is consistent and reaches the diffraction limit. The field lens can be divided into ordinary F-Theta lens and telecentric scanning lens. The telecentric scanning lens places the deflection position of the incident beam at the focal point in front of the object space. Consistent on-axis and off-axis image quality, and improved illumination uniformity, are widely used in laser cutting, laser drilling, and high-precision laser marking systems [0003] In laser scanning processing, the laser b...
Claims
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Login to View More IPC IPC(8): G02B13/00G02B13/22
CPCG02B13/0005G02B13/22
Inventor 辜长明朱国亮
Owner 淄博海泰新光光学技术有限公司