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Substrate transfer system and method

A transmission system and substrate technology, applied in the direction of conveyors, conveyor objects, conveyor control devices, etc., can solve problems such as unsatisfactory systems and methods

Active Publication Date: 2021-12-07
TAIWAN SEMICON MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] While existing substrate transfer systems and methods are adequate to achieve their goals, these systems and methods are still not satisfactory in all respects

Method used

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  • Substrate transfer system and method
  • Substrate transfer system and method
  • Substrate transfer system and method

Examples

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Embodiment Construction

[0048] The following disclosure presents many different embodiments, or preferred examples, for implementing various features of the disclosure. Of course, the present disclosure can also be implemented in many different forms without being limited to the embodiments described below. The following disclosure describes specific examples of each component and its arrangement in detail in conjunction with the accompanying drawings. In order to simplify the description, the disclosure is more thorough and complete, so as to fully convey the scope of the disclosure to those skilled in the art.

[0049] Spatial terms used hereinafter, such as "below", "beneath", "lower", "above", "higher" and similar terms, are for the convenience of describing an element in the drawings. or the relationship between a feature and another element or feature(s). These spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orienta...

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Abstract

The disclosure provides a substrate conveying system, including a belt, rollers, a substrate conveying component, a position sensor, and a driving mechanism. The rollers are configured to drive the belt to roll. The substrate conveying assembly is connected with the belt and used for conveying the substrate. The position sensor is configured to detect the position of the belt in the axle direction of the roller. The driving mechanism is configured to drive the rollers to move along the direction of the wheel shaft, so that the belt is kept within a predetermined position range in the direction of the wheel shaft. The substrate conveying system provided by the present disclosure can prolong the service life of the belt and reduce the chance of sudden belt breakage (that is, improve the reliability and availability of the substrate conveying system), reduce the scrap rate of the substrate, and improve the yield rate of each process .

Description

technical field [0001] Embodiments of the present invention relate to a semiconductor technology, and in particular to a substrate transfer system and method. Background technique [0002] In modern industrial society, automation control system has gradually replaced manpower and has become the key to improving production efficiency. Especially in the advanced semiconductor manufacturing process, a large number of automation control systems have been introduced to carry out various precise manufacturing steps in order to reduce costs and avoid human labor. Negligence. [0003] For example, semiconductor devices are produced by processing semiconductor substrates through a series of semiconductor manufacturing tools. Among them, one or more substrate transfer systems arranged in each manufacturing machine can send the substrate from the loading port into the processing chamber for a specific process, and after the process is completed, send the substrate out of the loading p...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B65G15/00B65G43/00B65G47/90
CPCB65G15/00B65G43/00B65G47/901B65G2203/0283B65G2203/042
Inventor 郑威昌廖启宏
Owner TAIWAN SEMICON MFG CO LTD
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