Accurate testing device and method for geometric parameter of complex optical curved surface

Abstract

An accurate testing device and a method for geometric parameters of a complex optical curved surface, suitable for accurate testing of geometric parameters of all vertical test intervention folding optical path with a large-caliber complex optical curved surface. The device comprises a laser tracker (1), a laser interferometer (2), a folding mirror (3), a compensation element (4), and an adjustingmechanism (6). The position and angle between the laser interferometer (2), the folding mirror (3), the compensation element (4), a to-be-tested optical curved surface (5), and the adjusting mechanism (6) are adjustable. The target ball of the laser tracker (1) is placed near an interferometer focus (F). The accurate testing of the geometric parameters such as the vertex curvature radius R, the off-axis quantity d, and the eccentricity Delta of the large-caliber complex optical curved surface is realized mainly by measure of the interferometer focus, all reference surface features of the complex curved surface, and the folding mirror characteristic with geometric operations such as mirroring and projection. The device and the method provided by the invention have simple process of data processing, calculation, and operation, low testing cost, and great versatility.

Description

technical field [0001] The invention relates to the technical field of detection of complex optical curved surfaces, in particular to an accurate testing device and method for geometric parameters of large-diameter complex optical curved surfaces. Background technique [0002] Large-aperture complex optical surfaces are important components of modern optical systems. During the development process, high-precision testing of geometric parameters such as vertex curvature radius, off-axis and eccentricity is the core key technology to ensure the quality of large-aperture complex optical surfaces. Provide technical support for the good comprehensive performance of modern optical systems. [0003] Due to the influence of factors such as environmental airflow disturbance and the support structure of the mirror body, the processing and detection scheme with vertical optical axis is generally adopted for large-diameter complex curved surfaces. In addition, the laser interferometer m...

AI Technical Summary

Problems solved by technology

[0005] Aiming at the technical problem of low measurement accuracy of geometric parameters caused by optical path refraction in the vertical interference inspection of large-diameter complex optical curved surfaces, the present invention proposes an accurate measurement of the geometric parameters of the deflected optical path that is suitable for all large-diameter complex optical curved surface vertical interference inspections. The device and method mainly measure the focal point of the interferometer, all the reference plane characteristics of the complex curved surface and the characteristics of the folding mirror, and realize the vertex curvature radius R, off-axis amount d and eccentricity of the large-caliber complex optical surface through geometric operations such as mirroring and projection. Accurate testing of geometric parameters such as Δ, simple data processing, calculation, and operation process, low testing cost, and good versatility

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