Device and method for precise testing and calibration of optical parameters of large-caliber complex curved surface

Abstract

The invention discloses a device for accurately testing and calibrating the optical parameters of a complex curved surface with a large diameter. The device performs testing and calibrating for the complex curved surface to be tested; The signal is sent to the laser interferometer, the compensation element and the adjustment mechanism of the complex curved surface to be measured, and the adjustment mechanism is controlled to adjust the relative position and relative angle of the three, so that the root mean square error of the surface shape of the complex curved surface is the smallest and the defocus amount is zero. ;Use the transformation matrix calibration mechanism to calibrate the coordinate transformation matrix of the laser tracker during the transfer process; based on the coordinate transformation matrix, the surface data are transformed into the same coordinate system; all surface data in the same coordinate system are Modeling analysis and calculation, and then the design results of the optical inspection compensator for the complex surface to be tested are further optimized, and the optimization result is the optimal design result of the optical inspection compensator based on the measured parameters of the mirror.

Description

technical field [0001] The invention relates to the technical field of complex curved surface detection, in particular to a device and method for accurately testing and calibrating optical parameters of large-diameter complex curved surfaces. Background technique [0002] Large-aperture complex curved surfaces are important components of modern optical systems. In the manufacturing process of complex curved surfaces, geometric parameters such as vertex curvature radius, off-axis amount and eccentricity are important parameters to describe reflective surfaces, and accurate testing and calibration of its optical parameters are the key to ensuring its quality during the development process. [0003] At present, the methods for measuring the optical parameters of complex curved surfaces are mainly two methods: measuring with a steel ruler or a spacer rod of known length, and using a laser tracker for direct measurement. When measuring with a steel ruler or a spacer rod of known...

AI Technical Summary

Problems solved by technology

When measuring with a steel ruler or a spacer rod of known length, the method of estimation is adopted. The accuracy of the steel ruler and the measuring rod is low and the apex position of the large-caliber complex surface cannot be accurately measured, resulting in low accuracy of the measurement method; When using a laser tracker for direct measurement, only a part of the reference plane of the compensation element and the complex curved surface can be measured. Due to the lack of reference plane information, the accidental factors in the test process will be amplified, resulting in a decrease in the accuracy of the optical parameter test

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