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A process for improving the saturation of white graphite boats at the edge of polycrystalline rie black silicon cells

A graphite boat and process technology, which is applied in the field of improving the saturation process of graphite boats with whitening at the edge of polycrystalline RIE black silicon cells, can solve the problems of whitening at the edges of dry-process black silicon cells, shorten the saturation process time, increase production capacity, The effect of reducing production costs

Active Publication Date: 2021-10-22
HENGDIAN GRP DMEGC MAGNETICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a method to increase the ability of the black silicon cell edge to absorb silicon nitride in order to solve the defect of whitening of the edge of the existing dry process black silicon cell, so as to solve the problem of whitening of the edge of the dry process black silicon cell Improvement of whitening graphite boat saturation process at the edge of polycrystalline RIE black silicon cell

Method used

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  • A process for improving the saturation of white graphite boats at the edge of polycrystalline rie black silicon cells
  • A process for improving the saturation of white graphite boats at the edge of polycrystalline rie black silicon cells

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Embodiment 1

[0035] A process for improving the saturation of a white graphite boat at the edge of a polycrystalline RIE black silicon battery, said process comprising the following steps: (1), stepping into the boat, drying the graphite boat after acid solution washing, and sending it into The graphite boat saturation process is carried out in the tubular PECVD furnace tube;

[0036] (2) After the furnace door is closed, the temperature from the furnace mouth to the furnace tail is raised to 400°C, the heating time is 600s, and the pressure is maintained at 300mTorr, the acid liquid remaining on the graphite boat can be further dried and drained;

[0037] (3) The time of the pre-cleaning step is 100s, the temperature is maintained at 400°C, 4000sccm of nitrogen gas is introduced, the pressure in the furnace tube is controlled at 1300mTorr, the radio frequency power of the radio frequency glow is 3000W, and the duty ratio is 3:36;

[0038] (4) The vacuum step time is maintained for 30s, th...

Embodiment 2

[0048] A process for improving the saturation of a white graphite boat at the edge of a polycrystalline RIE black silicon battery, said process comprising the following steps: (1), stepping into the boat, drying the graphite boat after acid solution washing, and sending it into The graphite boat saturation process is carried out in the tubular PECVD furnace tube;

[0049] (2) After the furnace door is closed, the temperature from the furnace mouth to the furnace tail is raised to 450°C, the heating time is 800s, and the pressure is maintained at 300mTorr, the acid liquid remaining on the graphite boat can be further dried and drained;

[0050] (3) The time of the pre-cleaning step is 150s, the temperature is maintained at 450°C, 5000sccm of nitrogen gas is introduced, the pressure in the furnace tube is controlled at 1500mTorr, the radio frequency power of the radio frequency glow is 3200W, and the duty ratio is 3:36;

[0051] (4) The vacuum step time is maintained for 40s, th...

Embodiment 3

[0061] A process for improving the saturation of a white graphite boat at the edge of a polycrystalline RIE black silicon battery, said process comprising the following steps: (1), stepping into the boat, drying the graphite boat after acid solution washing, and sending it into The graphite boat saturation process is carried out in the tubular PECVD furnace tube;

[0062] (2) After the furnace door is closed, the temperature from the furnace mouth to the furnace tail is raised to 500°C, the heating time is 1000s, and the pressure is maintained at 300mTorr, the acid liquid remaining on the graphite boat can be further dried and drained;

[0063] (3) The time of the pre-cleaning step is 200s, the temperature is maintained at 500°C, 6000sccm of nitrogen gas is introduced, the pressure in the furnace tube is controlled at 1600mTorr, the radio frequency power of the radio frequency glow is 3400W, and the duty ratio is 3:36;

[0064] (4) The vacuum step time is maintained for 50s, t...

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Abstract

The invention relates to a process for improving the saturation of a white graphite boat at the edge of a polycrystalline RIE black silicon cell. The saturation of the graphite boat is required to be lower than that of the graphite boat used in the conventional cell coating during the dry-process black silicon cell coating, and no reaction ion is required. To change the etching process and PECVD coating process, it is only necessary to reduce the saturation of the graphite boat by adjusting the temperature of the graphite boat saturation process, the time of the coating step, the gas flow rate and the radio frequency glow power, and the saturation process time is the same as the original saturation process The specific time is greatly shortened, and the gas flow rate is relatively reduced, which can increase production capacity and reduce production costs, increase the ability of graphite boats to absorb silicon nitride on the edge of black silicon cells, and solve the whitening of edges of dry-process black silicon cells.

Description

technical field [0001] The invention belongs to the field of polycrystalline solar cells, and in particular relates to a process for improving the saturation of a graphite boat with whitening at the edge of a polycrystalline RIE black silicon cell. Background technique [0002] Black silicon solar cells have attracted widespread attention due to their excellent antireflection properties, and the methods for preparing black silicon solar cells have also been developed, including reactive ion etching, plasma immersion ion implantation etching, metal nanoparticle catalytic etching and Laser etching, currently reactive ion etching (dry black silicon, RIE) and metal nanoparticle catalytic etching (wet black silicon, MCCE) are the main preparation methods for mass production of black silicon, and reactive ion etching matches passivation The process can increase the conversion efficiency of the cell by 0.6-0.7%, and the higher conversion efficiency can improve the competitiveness o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/20H01L21/67
CPCY02P70/50
Inventor 赵颖历文斌郑正明
Owner HENGDIAN GRP DMEGC MAGNETICS CO LTD