Imaging detection chip coupled with optical antenna and preparation method thereof
An optical antenna and photosensitive imaging technology, which is used in optical radiation measurement, radiation pyrometry, measurement devices, etc., to achieve the effect of high detection sensitivity and improved detection sensitivity
Active Publication Date: 2019-05-21
NANJING OPY ELECTRONICS TECH CO LTD
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[0004] In view of the above defects or improvement needs of the prior art, the present invention provides an imaging detection chip coupled with an optical antenna and a preparation method thereof, the purpose of which is to solve the above-mentioned technical problems existing in the existing photosensitive imaging array. The imaging detection chip of the optical antenna has the advantages of high imaging light wave collection efficiency, and the photoelectric sensitivity is significantly improved by integrating the optical antenna and photosensitive array, and it is suitable for visible light and infrared spectrum domains
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[0049] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.
[0050]On the surface of a variety of functional materials (such as conventional metals or semiconducting silicon germanium, etc.), the effect of resonant surface waves can be generated through the radiation excitation of visible light or infrared light; surface waves composed of surface electromagnetic waves and surface electron density waves Or surface plasmon polaritons, the effective transpor...
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Abstract
The invention discloses an imaging detection chip coupled with an optical antenna, which comprises the optical antenna and a photosensitive array which are arranged in parallel. The optical antenna isof an array structure composed of a plurality of antenna elements which are arranged at intervals and electrically connected. The photosensitive array is of an array structure composed of a pluralityof photosensitive elements which are arranged at intervals and electrically connected. The optical antenna and the photosensitive array have the same array scale, an antenna element of the optical antenna and the photosensitive element at a corresponding position in the photosensitive array are aligned with each other in the vertical direction, and the antenna element of the optical antenna comprises at least one nano pointed cone of which the top surfaces are electrically connected with each other. The imaging detection chip coupled with the optical antenna has the advantage of high imaginglight wave collection efficiency, photoelectric sensitivity is remarkably improved by integrating the optical antenna and the photosensitive array, and the imaging detection chip is suitable for visible light and infrared spectrum domains.
Description
technical field [0001] The invention belongs to the technical field of optical imaging detection, and more specifically relates to an imaging detection chip coupled with an optical antenna and a preparation method thereof. Background technique [0002] At present, photosensitive imaging arrays, as photosensitive detectors, have been widely used in various fields. Common photosensitive imaging arrays include photon detectors and thermal detectors, and photon detectors include visible light detectors (commonly CMOS devices) and infrared detectors (commonly FPAs). Visible light detectors are mainly used in the civilian field, and the minimum detectable optical power is as low as nanowatts; infrared detectors are mainly used in the military field, and their cost is relatively high; thermal detectors are based on micro-heat absorption and photoelectric signal generation This thermal detection mode works. [0003] However, there are some technical problems that cannot be ignored...
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Login to View More IPC IPC(8): G01J5/00G01J11/00
Inventor 张新宇张汤安苏
Owner NANJING OPY ELECTRONICS TECH CO LTD