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Clamping jig for 3inch large wafer corrosion

A clamping and jig technology, applied in the field of materials, can solve the problems of low experimental efficiency and unreasonable design of clamping jig, and achieve the effect of improving stability and simple structure

Pending Publication Date: 2019-05-24
四川泰美克科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The object of the present invention is to provide a clamping fixture for 3inch large-scale corrosion, which solves the problems of low experimental efficiency and unreasonable design of the clamping fixture in the above-mentioned existing corrosion tests

Method used

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  • Clamping jig for 3inch large wafer corrosion
  • Clamping jig for 3inch large wafer corrosion
  • Clamping jig for 3inch large wafer corrosion

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0059] Such as Figure 1-Figure 5 As shown, the present invention is a clamping fixture for 3-inch large-scale corrosion, including a bottom bar 1, the axis of the bottom bar 1 is parallel to the horizontal plane, and N spacer bars 2 are arranged on the upper surface of the bottom bar 1 , the axes of the spacer bars 2 are all perpendicular to the axis of the bottom bar 1 , and the spacer bars 2 are evenly distributed along the axis of the bottom bar 1 at regular intervals, N≥2.

[0060] When performing material corrosion, prepare N-1 material sheets 4, and place a material sheet 4 between two adjacent spacers 2, such as Figure 5 As shown, the present invention carrying the material sheet 4 is then placed in the etching solution for subsequent etching operations. The material 4 can be a large piece of material with a size of 3 inches, specifically, a 3-inch quartz wafer, silicon wafer, or glass wafer.

[0061] Preferably, the shortest distance L between the spacers 2 1 grea...

Embodiment 2

[0065] This embodiment is a specific description of the structure of the spacer 2 in the first embodiment.

[0066] Such as Figure 1-Figure 3 As shown, in the present invention, the cross-section of the spacer 2 is rhombus, and a conductive surface 3 is provided between the adjacent side walls of the spacer 2, and a diagonal line of the rhombus is parallel to the bottom The axis of the strip 1, and the connecting surfaces 3 at both ends of the diagonal are perpendicular to the axis of the bottom strip 1.

[0067] When placing the sheet of material, it is necessary to make surface-to-surface contact between the sheet of material and the present invention, and directly contacting it with the side wall of the spacer bar 3 will cause a larger contact surface, and by reducing the size of the spacer bar 2 When reducing the contact surface, the intensity of the spacer 2 will be reduced again, which is unfavorable for the long-term use of the present invention and the smooth progres...

Embodiment 3

[0071] This embodiment is based on the above embodiments, and further explains the structure of the supporting and fixing material sheet of the present invention.

[0072] Such as Figure 6-17 As shown, in the present invention, side strips 5 are arranged on both sides of the bottom strip 1, and the axes of the side strips 5 are all parallel to the axis of the bottom strip 1. The axis is provided with N-1 oblique grooves 7, and the two ends of the oblique grooves 7 communicate with the upper surface of the side bar 5 and the inner side wall of the side bar 5 close to the bottom bar 1 respectively. The slanting slots 7 are in one-to-one correspondence, and the intervals between the slanting slots 7 and the middle spacers 2 are in one-to-one correspondence, and the side bars 5 are disassembled and connected to the bottom bar 1 through the connecting plate 6 .

[0073] The detachable connection can be realized through component structures such as bolts, screws, buckles, Velcro, ...

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Abstract

The invention discloses a clamping jig for 3inch large wafer corrosion. The clamping jig comprises a bottom bar and is characterized in that the axis of the bottom bar is parallel to the horizontal plane, the upper surface of the bottom bar is provided with N partition bars, the axes of the partition bars are vertical to the axis of the bottom bar, the partition bars are sequentially evenly distributed along the axis of the bottom bar at intervals, and N> / =2; during material corrosion, N-1 material pieces are prepared, one material piece is placed between every two adjacent partition bars, andthe clamping jig bearing the material pieces are placed into corrosion liquid to perform subsequent corrosion operation. The clamping jig has the advantages that every two adjacent material pieces are partitioned by the partition bar between the material pieces, and mutual adhesion of the material pieces during corrosion is avoided; meanwhile, the material pieces are only supported and positionedthrough the partition bars and the bottom bar, the material pieces can evenly and sufficiently contact with the corrosion liquid, and the corrosion test can be smoothly performed favorably.

Description

technical field [0001] The invention relates to the field of materials, in particular to a clamping fixture for 3-inch large sheet corrosion. Background technique [0002] Corrosion resistance: The ability of a material to resist the corrosive damage of the surrounding medium is called corrosion resistance, which is determined by the composition, chemical properties, and structure of the material. PTFE is a "non-stick coating" material that is resistant to various strong acids, strong alkalis and organic corrosion, almost insoluble in all solvents, and resistant to high temperatures. [0003] In the experiment of determining the corrosion performance of materials, multiple experiments are required to obtain relatively stable experimental data. Materials such as quartz wafers, silicon wafers, and glass sheets used in industrial production have the characteristics of large size and fragility. General fixtures cannot meet the needs of large-scale experiments or production, and...

Claims

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Application Information

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IPC IPC(8): G01N17/00
Inventor 陆旺叶嘉豪李辉
Owner 四川泰美克科技有限公司