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Production and processing method of high-quality quartz boat

A processing method, quartz boat technology, applied in the direction of electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve problems such as easy deformation, poor product quality, affecting product quality and corporate reputation, etc., to prevent deformation and reduce manufacturing costs. Low cost, convenient operation and quick effect

Active Publication Date: 2019-06-14
扬州美和光电科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The quality of the products produced according to the traditional processing technology is poor. The reason is that during the annealing process, the product is directly placed on the quartz frame and pushed into the annealing furnace together with the pull hook and the quartz frame for annealing. After annealing, the pull hook hooks the quartz frame to release the product Pull out and place on a graphite plate for cooling
Because the quartz boat groove rod is designed as a long strip structure, it is prone to deformation during the high temperature annealing process, especially at the center of the groove rod, that is, the deformation is more obvious at the center of gravity of the groove rod, which seriously affects the quality and quality of the product. Enterprise reputation

Method used

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  • Production and processing method of high-quality quartz boat
  • Production and processing method of high-quality quartz boat
  • Production and processing method of high-quality quartz boat

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0066] This embodiment includes the following steps:

[0067] a. Incoming material inspection;

[0068] b. Cutting: Cut the qualified quartz rods in step a according to the specified size requirements;

[0069] c. Machining center processing; use the machining center to process the insert groove of the quartz rod and the side plate 7 of the quartz boat;

[0070] d. pickling: using pickling solution to clean the product of step c;

[0071] e. Cleaning with pure water: put the product of step d into pure water for cleaning, and then dry naturally after cleaning;

[0072] f. Pyroprocessing: use a quartz torch to weld the product of step e, and after the quartz rod and the side plate 7 are fixed, the semi-finished quartz boat is formed;

[0073] g. Support annealing: Push the semi-finished quartz boat in step f into the annealing furnace for annealing to relieve stress. The semi-finished quartz boat is supported by the annealing support platform in the furnace and placed on the...

Embodiment 2

[0081] This embodiment includes the following steps:

[0082] a. Incoming material inspection;

[0083] b. Cutting: Cut the qualified quartz rods in step a according to the specified size requirements;

[0084] c. Machining center processing; use the machining center to process the insert groove of the quartz rod and the side plate 7 of the quartz boat;

[0085] d. pickling: using pickling solution to clean the product of step c;

[0086] e. Cleaning with pure water: put the product of step d into pure water for cleaning, and then dry naturally after cleaning;

[0087] f. Pyroprocessing: use a quartz torch to weld the product of step e, and after the quartz rod and the side plate 7 are fixed, the semi-finished quartz boat is formed;

[0088] g. Support annealing: Push the semi-finished quartz boat in step f into the annealing furnace for annealing to relieve stress. The semi-finished quartz boat is supported by the annealing support platform in the furnace and placed on the...

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Abstract

The invention discloses a production and processing method of a high-quality quartz boat, belongs to the technical field of semiconductor silicon wafer carriers, and aims at solving the problem that the products processed by the traditional quartz boat production process are easy to deform and relatively bad in quality. The method mainly comprises the processes of material inspection, cutting, processing at a processing center, acid pickling, pure water cleaning, fire processing, bearing annealing, acid pickling, pure water cleaning and packaging shipment. The products produced by the method provided by the invention are high in quality; a channel bar is borne by a high temperature-resistant panel, so that the channel bar is effectively prevented from generating deformation in the annealing process; through the structural design of a stay cord type annealing bearing platform, the method has strong universality; and the method is low in improvement cost, low in annealing bearing platform manufacturing cost, convenient and rapid to operate and use, strong in practicability and wide in application, ad has great significance in the technical field of quartz boat processing.

Description

technical field [0001] The invention belongs to the technical field of semiconductor silicon wafer carriers, and in particular relates to a production and processing method of a high-quality quartz boat with simple operation, low manufacturing cost and greatly improved product quality. Background technique [0002] Quartz boat is a carrier tool for semiconductor silicon wafers. It is currently the most widely used and has two uses: 1. There is a critical step in the production process of solar cells called diffusion. In this step, the quartz boat is required as a carrying fixture in the diffusion furnace. Fixed silicon solar cell semi-finished products; 2. There are multiple process steps in the production process of semiconductor silicon wafers. Quartz boats are required to carry semi-finished silicon wafers from one process to the next. For example, in the production process of LED epitaxial wafers, multiple silicon wafers are required Chip appearance, product performance ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/673
Inventor 郭辉徐亮荣
Owner 扬州美和光电科技有限公司
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