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Metal mask for preventing falling of evaporation metal layer and manufacturing method

A technology of metal mask and manufacturing method, which is applied in the field of OLED, can solve the problems of roughness of the entire back surface, and achieve the effects of reducing defect rate, improving bonding force, and preventing falling off

Pending Publication Date: 2019-06-21
NANJING TOPTO MATERIALS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a metal mask plate and its manufacturing method to prevent the evaporated metal layer from falling off, so as to solve the technical problem that the metal mask plate in the prior art cannot make its entire backside completely rough

Method used

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  • Metal mask for preventing falling of evaporation metal layer and manufacturing method
  • Metal mask for preventing falling of evaporation metal layer and manufacturing method
  • Metal mask for preventing falling of evaporation metal layer and manufacturing method

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Embodiment Construction

[0016] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0017] The process of the method for making a metal mask plate in an embodiment of the present invention to prevent the peeling of the evaporated metal layer is as follows: figure 2 As shown, the production method of this embodiment includes the following steps: (1) Cleaning: Use cleaning equipment to clean the sheet-shaped INVAR alloy material to remove oil stains on the surface of the INVAR alloy; (2) Inkjet: Use inkjet equipment to uniformly separate the ink Spray onto the upper and lower surfaces of the cleaned INVAR alloy, and the ink is dried on the two surfaces of the INVAR alloy to form an ink layer; (3) Single-sided exposure: use an exposure machine to irradiate UV light to the ink layer on one side of the INVAR alloy On the surface, the ink layer on this surface is completely irradiated by UV light to undergo photopolymerization; (...

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PUM

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Abstract

The invention discloses a metal mask for preventing falling of an evaporation metal layer and a manufacturing method thereof. In the manufacturing process, one surface of an INVAR alloy is subjected to etching treatment firstly, one surface of the INVAR alloy is subjected to whole surface etching to form a rough surface, then an opening is manufactured, and therefore a rough area and the opening have no distance limitation. The metal mask is of a sheet-like structure having hollow meshes, one side of the metal mask is wholly the rough surface, and therefore the bonding force between a metal material and the metal mask during evaporation is improved, falling of the metal material during evaporation is prevented, and the defect rate of products is lowered.

Description

technical field [0001] The invention relates to a metal mask for preventing vapor-deposited metal layers from falling off and a manufacturing method thereof, belonging to the technical field of OLEDs. Background technique [0002] Metal masks (masks) for evaporation in the OLED industry, such as figure 1 As shown, in the process of evaporating the metal layer (cathode layer), because the magnesium-silver alloy (Mg / Ag) is doped with lithium fluoride (LiF), the bonding force between the material 21 and the metal mask 1 is not enough, and the metal layer 22 is easy to cause shedding. In order to ensure the adhesion of the magnesium-silver alloy evaporated on the metal mask, roughness can be added to the lower surface of the metal mask. If roughness is directly added to the back of the finished metal mask, in order to avoid damage to the opening of the metal mask, a distance of 0.3~1mm is usually left between the boundary of the rough area and the opening. Contents of the in...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/24
Inventor 王宝
Owner NANJING TOPTO MATERIALS CO LTD
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