Method of assessing electro-static discharge sensitivity of flat panel display product in manufacture

An electrostatic discharge and flat-panel display technology, applied in electrical digital data processing, special data processing applications, instruments, etc., can solve problems such as ESD risk situations that are difficult for FPD products, and achieve the effect of electrostatic protection protection goals.

Active Publication Date: 2019-06-25
广州林恩静电科学技术应用有限公司
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Problems solved by technology

Therefore, since the TFT devices designed in these TFTESD sensitivity evaluation methods interact with electrostatics significantly different from the actual FPD manufacturing stage, it is difficult for the resulting evaluation results to effectively reflect the different FPD products in the production stage. ESD risk situation

Method used

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  • Method of assessing electro-static discharge sensitivity of flat panel display product in manufacture
  • Method of assessing electro-static discharge sensitivity of flat panel display product in manufacture
  • Method of assessing electro-static discharge sensitivity of flat panel display product in manufacture

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Embodiment 1

[0043] Example 1: See Figure 1-13 , a method for assessing the electrostatic discharge susceptibility of flat panel display products in manufacturing, comprising the following steps:

[0044] A. Establish a simulation model of the electronic device structure of the FPD product in the front-end manufacturing process. Figure 8 In this invention, for simulating the front-end production process of FPD products, especially one type of main ESD failure situation in the TFT Array section-the ESD failure type between different metal film layers of TFT, the invention is related to the ESD risk of the corresponding production process Matched TFT device simulation model. The claims involved in this invention include: 1. Use the cross shape and stacked structure to simulate the ESD failure structure characteristics between different metal film layers in TFT devices in FPD products; 2. The ESD evaluation application range of FPD products includes TFT-LCD , rigid AMOLED (Active Matrix O...

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Abstract

The invention discloses a method of assessing electro-static discharge (ESD) sensitivity of flat panel display (FPD) product in manufacture. The method comprises the following steps of: A, establishing an electronic device structure simulation model of an FPD product in a front-end manufacturing process; B, establishing an ESD failure condition simulation model in the front end manufacturing process of the FPD product according to the simulation model in the step A; and C, establishing an ESD failure sensitivity test method in the front end manufacturing process of the FPD product according tothe simulation model in the step B. With the adoption of the method and the device, an FPD manufacturing factory can master the ESD sensitivity degree of the FPD product of the FPD manufacturing factory, and reasonable electrostatic protection planning design can be performed in the factory according to the ESD sensitivity degree, so that an effective electrostatic protection target in an FPD product production and manufacturing stage is realized.

Description

technical field [0001] The flat panel of the invention relates to the field of display technology, in particular to a method for evaluating the electrostatic discharge sensitivity of flat panel display products during manufacture. Background technique [0002] In the flat panel display (FPD, Flat Panel Display) product manufacturing industry, there is no publicly released method suitable for evaluating the ESD (Electro-Static Discharge, electrostatic discharge) sensitivity method in the manufacturing stage of flat panel display products, so that each flat panel display When manufacturing enterprises carry out electrostatic protection in the production stage of the factory, the method design and implementation of electrostatic protection measures that cannot be realized can provide effective and appropriate electrostatic failure prevention protection for flat panel display products. attached Figure 4 , 5 , 6, and 7 are currently the representative main technical implementat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F17/50
CPCY02P90/30
Inventor 侯长军邓飞李兴红顾新波
Owner 广州林恩静电科学技术应用有限公司
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