Continuous hot-pressing sintering device and method for metal oxide evaporation target

A hot-pressing sintering and oxide technology, applied in cooking furnaces, lighting and heating equipment, furnaces, etc., can solve the problems of unfavorable and precise control of the size of sintered products, large shrinkage of product diameters, and low production efficiency, and can avoid heating and cooling. Operation, saving sintering time, the effect of short sintering time

Pending Publication Date: 2019-06-28
GUANGXI CRYSTAL UNION PHOTOELECTRIC MATERIALS CO LTD
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

In this traditional process, the diameter of the product shrinks greatly during sintering, which is not conducive to precise control of the size of the sintered product. Since the target material needs to be mixed with fat for molding, degreasing is required in the later stage (that is, additional heating and cooling operations are required for degreasing), so There are problems of long sintering cycle and low production efficiency

Method used

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  • Continuous hot-pressing sintering device and method for metal oxide evaporation target
  • Continuous hot-pressing sintering device and method for metal oxide evaporation target
  • Continuous hot-pressing sintering device and method for metal oxide evaporation target

Examples

Experimental program
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Effect test

Embodiment 1

[0024] Example 1: A continuous hot-press sintering device for metal oxide evaporation targets, such as Figure 1-Figure 4 As shown, it includes a hydraulic machine frame 1, an upper hydraulic ram 2, a lower hydraulic ejector 8, a hot-press furnace body 5, a three-temperature section heat pipe 9 and a graphite mold 13 for target molding. The upper hydraulic ram 2 and the lower hydraulic ejector head 8 are respectively installed on the upper and lower ends of the hydraulic machine frame 1, the hot-press furnace body 5 is installed on the hydraulic machine frame 1 through the support plate 11, and the hot-press furnace body is located on the upper hydraulic pressure head 2 and the lower hydraulic pressure head. Between the heads 8, the graphite mold 13 is a cylinder with a target forming moving channel 131 in the middle, the graphite mold is installed in the hot press furnace body, and the upper hydraulic head is connected with a The graphite upper die rod 4 is connected with the...

Embodiment 2

[0028] Embodiment 2: A continuous hot-press sintering method for a metal oxide evaporation target, the device used is the continuous hot-press sintering device for a metal oxide evaporation target described in Example 1, comprising the following steps:

[0029] (1) Raise the temperature in the furnace cavity of the hot-pressing furnace body 5 to the sintering temperature of 1000°C and keep it constant;

[0030] ⑵Adjust the position of the graphite upper mold rod 4 and the graphite lower mold rod 7 through the upper hydraulic pressure head 2 and the lower hydraulic ejector head 8 to form the required mold cavity;

[0031] (3) Add a certain amount (21g) of powder through the powder inlet 3, and vacuum the mold cavity through the suction port 14. After the gas in the mold cavity and powder is discharged, the upper hydraulic pressure head drives the graphite upper mold rod to Move down and keep it in the required position for 10 minutes, so that the powder is sintered under pressu...

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Abstract

The invention relates to a continuous hot-pressing sintering device for a metal oxide evaporation target. The device comprises a hydraulic press rack, an upper hydraulic pressure head, a lower hydraulic ejector head, a hot-pressing furnace body, a three-warm-section heat tube and a graphite mould used for target forming, wherein the upper hydraulic pressure head and the lower hydraulic ejector head are separately mounted on the hydraulic press rack; the hot-pressing furnace body is mounted on the hydraulic press rack through a supporting plate; the graphite mould is mounted in the hot-pressingfurnace body; a graphite upper mould rod is connected on the upper hydraulic pressure head; a graphite lower mould rod is connected on the lower hydraulic ejector head; one end of the three-warm-section heat tube is connected with the hot-pressing furnace body, and communicates with the graphite mould through a target push-out channel; the other side of the hot-pressing furnace body and the otherside of the graphite mould are further equipped with a pushing rod; and the three-warm-section heat tube is outwards sequentially divided into a high-temperature region, a middle-temperature region and a low-temperature region from the hot-pressing furnace body. The continuous hot-pressing sintering device has the advantages of being continuous in sintering, short in single target sintering time,free of grease mixing during forming, and high in target dimension control precision (up to +/-0.2mm), and is suitable for batch production.

Description

technical field [0001] The invention relates to a continuous hot-press sintering device and method for metal oxide vapor deposition targets, belonging to the field of preparation of metal oxide vapor deposition targets. Background technique [0002] The existing method of preparing metal oxide evaporation targets mainly adopts the traditional process of forming first and then sintering. The forming process of the existing process requires fat doping, so degreasing operation is also required in the later sintering process. In this traditional process, the diameter of the product shrinks greatly during sintering, which is not conducive to precise control of the size of the sintered product. Since the target material needs to be mixed with fat for molding, degreasing is required in the later stage (that is, additional heating and cooling operations are required for degreasing), so There are problems of long sintering cycle and low production efficiency. Contents of the invent...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F27B5/05F27B5/06C04B35/64
Inventor 陆映东张倍维梁盈祥农浩莫斌
Owner GUANGXI CRYSTAL UNION PHOTOELECTRIC MATERIALS CO LTD
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