Manufacturing method of electromagnetic shielding system, electromagnetic shielding system and chip testing equipment
A technology of electromagnetic shielding and shielding layer, applied in the fields of magnetic field/electric field shielding, chemical instruments and methods, electrical components, etc., can solve problems such as inaccurate measurement, achieve the effects of simple processing, solving inaccurate measurement, and eliminating external electromagnetic interference
Active Publication Date: 2020-07-14
TECHNICAL INST OF PHYSICS & CHEMISTRY - CHINESE ACAD OF SCI
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Problems solved by technology
[0008] The embodiment of the present invention provides a manufacturing method of an electromagnetic shielding system, an electromagnetic shielding system and a chip detection device, which are used to solve the defect of inaccurate measurement caused by interference of the measurement signal in the electrical detection process in the prior art, which is beneficial to integration and miniaturization, effectively simplifying the process
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[0030] Embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but should not be used to limit the scope of the present invention.
[0031] In the description of the present invention, unless otherwise specified, "plurality" means two or more. The orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail" etc. is Based on the orientation or positional relationship shown in the drawings, it is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood To limit the present invention. In addition, the terms "firs...
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The invention relates to the technical field of microfluidic devices and in particular to a method for manufacturing an electromagnetic shielding system, an electromagnetic shielding system and a chipdetecting device. The electromagnetic shielding system includes a first shielding layer and a second shielding layer, wherein a chip layer for packaging a chip is disposed between the first shieldinglayer and the second shielding layer; shielding channels are disposed in the first shielding layer and the second shielding layer; a conducting pipeline penetrating through the chip layer is disposedbetween the two shielding channels; and the shielding channels and the conducting pipeline are filled with liquid metal fluids. The electromagnetic shielding system can packages the upper and lower surfaces of the chip, can comprehensively shield the chip by using an electromagnetic shielding effect generated by the liquid metal fluids, can solve the problem of inaccurate measurement caused by measurement signal interference in an electric detection process in the prior art, can simplify the manufacturing process of the electromagnetic shielding of the microfluidic chip, improves the reliability of the electric detection result of the microfluidic chip, and is easy to process and easy to integrate.
Description
technical field [0001] The invention relates to the technical field of microfluidic equipment, in particular to a manufacturing method of an electromagnetic shielding system, an electromagnetic shielding system and chip detection equipment. Background technique [0002] The microfluidic chip laboratory can realize various functional operations of conventional biological and chemical laboratories. For a complete set of microfluidic chips, in addition to the structure of the chip for fluid control, the signal detection and acquisition Structure is also indispensable. [0003] Since in the microfluidic chip, various chemical and biological reactions occur in the micron-sized fluid channels, compared with conventional detection, the volume of the solution to be tested in the microfluidic chip laboratory is extremely small, and the requirements for detection More stringent, the detection needs to at least meet the requirements of high sensitivity, fast response, and small struct...
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IPC IPC(8): H05K9/00B01L3/00
Inventor 桂林刘冰心
Owner TECHNICAL INST OF PHYSICS & CHEMISTRY - CHINESE ACAD OF SCI