A disk resonant gyroscope based on optical waveguide and its processing and packaging method
A resonant gyroscope and optical waveguide technology, which is used in gyroscope/steering sensing equipment, gyro effect for speed measurement, instruments, etc., can solve problems such as sensitivity, difficulty in establishing accurate mathematical models for waveguide models, large measurement deviation, etc. Simple, good dynamic performance, the effect of eliminating the effect of parasitic capacitance
Active Publication Date: 2021-01-26
SOUTHEAST UNIV
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Problems solved by technology
The main technical deficiency is that nanoscale optical structures are extremely sensitive, and processing errors will lead to large measurement deviations; the research on the basic theory of optical waveguides is still in its infancy, and it is difficult to establish accurate mathematical models for complex waveguide models; The research on the combination of detection technology and MEMS technology is still less
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[0048] The technical solution of the present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0049]A disc resonant gyroscope based on an optical waveguide, including an SOI structure and a glass cap, the SOI structure is a silicon device layer, a silicon dioxide insulating layer and a silicon substrate layer from top to bottom; the silicon device layer includes a circular anchor point, The first ring groove structure, the optical structure, the electrode pad and the first metal bonding area, wherein the circular anchor point is arranged in the central area, and the first ring groove structure is concentrically arranged on the periphery of the circular anchor point , the optical structure is evenly distributed on the periphery of the first circular groove structure, the electrode pads correspond to the optical structure one by one, and are located outside the optical structure away from the circular anchor poi...
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Abstract
The invention discloses a disk-type resonant gyroscope based on an optical waveguide and a processing and packaging method thereof. The gyroscope includes a bonding-connected SOI structure and a glass cap, and the SOI structure is respectively a silicon device layer, a silicon dioxide insulating Layer and silicon substrate layer; the central area of the silicon device layer is a circular anchor point, and the circular anchor point is concentrically provided with a ring groove structure, and optical structures are evenly distributed on the periphery of the ring groove structure, and each optical structure is set outside There are corresponding electrode pads; there are a number of back through holes in the silicon substrate layer; the silicon dioxide insulating layer is provided with a circular groove to make the circular groove and the back through hole communicated; the cavity of the glass cap is located in the glass cap In the middle area of the back, the glass cap is provided with a grating round hole with an unopened bottom at the position opposite to the nano-grating, and an electrode round hole with a completely opened bottom at the position opposite to the electrode pad. The invention has small size, good sealing performance and high sensitivity, and can realize high-precision optical detection.
Description
technical field [0001] The invention relates to the fields of micro-electromechanical systems and optical waveguides, in particular to a disk-type resonant gyroscope based on optical waveguides and a processing and packaging method thereof. Background technique [0002] The disk resonant gyroscope is a highly symmetrical vibrating gyroscope based on the Coriolis effect. It can measure the angle by switching between the sensitive mode and the detection mode. Optical waveguide technology is an emerging technology with high detection accuracy. The combination of disk resonant gyroscope and optical waveguide technology makes the gyroscope have high measurement accuracy, super stability and reliability, low energy loss, and strong resistance to electromagnetic and atomic radiation interference. The disk gyroscope has a long life expectancy and is a key component in the continuous inertial navigation system, which has a very broad development prospect. [0003] In 2014, Tsanh-Hu...
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IPC IPC(8): G01C19/5684
CPCG01C19/5684
Inventor 夏敦柱宫旭亮李锦辉黄泠潮
Owner SOUTHEAST UNIV