Method for producing pyrogenic silica
A technology of fumed silica and dichlorosilane, used in silica, silica, chemical instruments and methods, etc., can solve problems such as harmful ignition, and achieve the effect of stable production start and stable production
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Embodiment 1
[0098] Embodiment 1: comparative embodiment (not the present invention)
[0099] Substance stream b is a silane mixture from industrial scale production with a composition comprising
[0100] 63.7vol.% silicon tetrachloride,
[0101] 8.0vol% trichlorosilane,
[0102] 28.1vol% dichlorosilane and
[0103] 0.2 vol% of monochlorosilane.
[0104] Due to the preparation, the silane mixture may contain small amounts of impurities (eg boron chloride, aluminum chloride or hydrocarbons, or further silanes (up to 0.1 vol %)).
[0105] The silane mixture is converted into a gaseous state in the silane evaporator and passed through as image 3 The pipe connections shown in are introduced at a temperature of 105° C. into an air stream (substance stream d) at a temperature of 105° C. in the mixing chamber without premixing with substance stream a. Substance stream a consisting of natural gas and hydrogen is introduced separately into the mixing chamber M at a temperature of 105° C. via ...
Embodiment 2
[0110]Substance stream b is a silane mixture from industrial scale production with a composition comprising
[0111] 63.7vol% silicon tetrachloride,
[0112] 8.0vol% trichlorosilane,
[0113] 28.1vol% dichlorosilane and
[0114] 0.2 vol% of monochlorosilane.
[0115] Due to the preparation, the silane mixture may contain small amounts of impurities (for example, boron chloride, aluminum chloride or hydrocarbons, or further silanes (up to 0.1 vol %).
[0116] The silane mixture is converted into a gaseous state in the silane evaporator, and passed through as figure 1 The pipe connection shown is in contact with stream a consisting of natural gas and hydrogen heated up to 105° C. upstream of the basket filter in order to achieve 93.2 parts by weight of silane and 6.8 parts by weight of fuel gas (substance stream c). Based on its mass, the ratio of hydrogen to natural gas is 1:1. The mixture from the basket filter is introduced at a temperature of 105° C. into a mixing cham...
Embodiment 3
[0121] Embodiment 3 (the present invention):
[0122] Substance stream b is a silane mixture from industrial scale production with a composition consisting of
[0123] 63.7vol% silicon tetrachloride,
[0124] 8.0vol% trichlorosilane,
[0125] 28.1vol% dichlorosilane and
[0126] 0.2 vol% of monochlorosilane.
[0127] Due to the preparation, the silane mixture may contain small amounts of impurities (eg boron chloride, aluminum chloride or hydrocarbons, or further silanes (up to 0.1 vol %)).
[0128] The silane mixture is converted into a gaseous state in the silane evaporator, and passed through as figure 1 The pipe connection shown is in contact with a substance stream a consisting of natural gas and hydrogen heated to 105° C. in a basket filter, so that 93.2 parts by weight of silane and 6.8 parts by weight of fuel gas are obtained (substance stream c). Based on its mass, the ratio of hydrogen to natural gas is 1:1. The basket filter is equipped with 2 separate inlets...
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