XY[theta] three-degree-of-freedom compliant precise positioning platform with two-stage displacement amplification

Abstract

The invention relates to the technical field of micro-nano operation and precise positioning, in particular to an XY[theta] three-degree-of-freedom compliant precise positioning platform with two-stage displacement amplification. The platform comprises a hexagonal base, a piezoelectric ceramic driver, a movable platform and three secondary displacement amplification flexible branch chains which are identical in structure. The three equilateral sides of the base are perpendicular to the telescopic direction of the piezoelectric ceramic driver. Three grooves are respectively formed in three included angle positions of the base. The piezoelectric ceramic driver is placed in the groove through a pre-tightening screw. The movable platform is arranged in the center of the hexagonal base and is connected with the secondary displacement amplification flexible branch chains, the secondary displacement amplification flexible branch chains, the movable platform and the base are connected througha flexible circular hinge, and the whole structure is integrally machined and manufactured through linear cutting. The whole positioning platform is integrally manufactured and machined through the wire cut electrical discharge machining technology, and errors caused by mechanical assembly are eliminated.

Description

technical field [0001] The invention relates to the technical field of micro-nano operation and precise positioning, in particular to an XYθ three-degree-of-freedom compliant precise positioning platform with secondary displacement amplification. Background technique [0002] With the development of the field of mechanical precision and microbiology, micro-nano measurement and characterization has become the focus of scholars' research. As a result, micro-nano technology has developed rapidly, and micro-nano precision devices have become more and more widely used. The existing three-degree-of-freedom micro-nano precision positioning platforms mostly use piezoelectric ceramics as drivers. Piezoelectric ceramics have high output force, high response speed and high resolution, but their output displacement is limited, which cannot meet the travel requirements of scientific research. Therefore, it is necessary to use an amplifying mechanism to amplify the stroke, but the applica...

AI Technical Summary

Problems solved by technology

The existing three-degree-of-freedom micro-nano precision positioning platforms mostly use piezoelectric ceramics as drivers. Piezoelectric ceramics have high output force, high response speed and high resolution, but their output displacement is limited, which cannot meet the travel requirements of scientific research. Therefore, it is necessary to use an amplifying mechanism to amplify the stroke, but the application of the amplifying mechanism often brings problems such as large structural volume and low natural frequency, so it is urgent to design a three-degree-of-freedom positioning platform that can solve this problem

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