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Preparation method and application of amorphous carbon film with piezoresistive properties and toughness on flexible substrate surface

A flexible substrate and amorphous carbon film technology, applied in metal material coating process, vacuum evaporation plating, coating, etc., can solve the problems of less application of flexible sensors, high cost, and difficulty in mass production, and achieve good toughness , easy preparation, and the effect of improving the piezoresistive coefficient

Active Publication Date: 2021-06-11
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The most representative piezoresistive sensitive material is single crystal silicon, but due to the preparation process, its application in the field of flexible sensors is seldom
In recent years, new sensitive materials represented by graphene and carbon nanotubes have been used more and more in flexible strain sensors. However, due to the transfer process still required after their preparation, their production is difficult to batch and the cost is high.

Method used

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  • Preparation method and application of amorphous carbon film with piezoresistive properties and toughness on flexible substrate surface
  • Preparation method and application of amorphous carbon film with piezoresistive properties and toughness on flexible substrate surface
  • Preparation method and application of amorphous carbon film with piezoresistive properties and toughness on flexible substrate surface

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0038] In this implementation example, the flexible base material is PI, and an amorphous carbon film is prepared on the surface of the flexible base, as follows:

[0039] (1) The flexible substrate is ultrasonically cleaned with acetone and dried, then placed in a vacuum coating chamber and evacuated to 2.7×10 - 3 Pa, then etched the substrate surface with argon plasma for 30min;

[0040] (2) Adopt high-power pulse magnetron sputtering technology, select high-purity graphite target, sputter carbon atoms from the high-purity graphite target through ionized argon gas, and deposit on the surface of the flexible substrate after step (1) Amorphous carbon film, the pressure of argon gas in the vacuum coating chamber is controlled to 0.1Pa, the high-power pulse power supply voltage is 800V, the pulse duty ratio is 1%, and the flexible substrate DC pulse negative voltage is -10V to obtain an amorphous carbon film.

[0041] The above-mentioned flexible substrate deposited on the sur...

Embodiment 2

[0063] In this implementation example, the flexible substrate is the same as in Example 1, and an amorphous carbon film is prepared on the surface of the flexible substrate, as follows:

[0064] (1) is identical with the step (1) in embodiment 1;

[0065] (2) is basically the same as step (2) in embodiment 1, and difference is that the high-power pulse power supply voltage is 1000V;

[0066] Similar to Example 1, the above-mentioned flexible substrate deposited on the surface of the amorphous carbon film was stretched and deformed to test the piezoresistive properties of the amorphous carbon film, and the results were as follows Figure 5 It is shown that the amorphous carbon film has good piezoresistive properties. Similar to Example 1, after the piezoresistive test, the amorphous carbon film did not crack due to the deformation test, and had good toughness.

Embodiment 3

[0068] In this implementation example, the flexible substrate is the same as in Example 1, and an amorphous carbon film is prepared on the surface of the flexible substrate, as follows:

[0069] (1) is identical with the step (1) in embodiment 1;

[0070] (2) is basically the same as step (2) in embodiment 1, and difference is that the pulse duty cycle is 5%;

[0071] Similar to Example 1, the above-mentioned flexible substrate deposited on the surface of the amorphous carbon film was stretched and deformed to test the piezoresistive properties of the amorphous carbon film, and the results were as follows Image 6 It is shown that the amorphous carbon film has good piezoresistive properties. Similar to Example 1, after the piezoresistive test, the amorphous carbon film did not crack due to the deformation test, and had good toughness.

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Abstract

The invention provides a method for preparing an amorphous carbon film with piezoresistive performance and toughness on the surface of a flexible substrate. The method adopts high-power pulse magnetron sputtering technology, selects graphite target, sputters and deposits an amorphous carbon film on the surface of a flexible substrate in an inert gas atmosphere, the pulse power supply voltage is 800-1000V, and the pulse duty ratio is 1%-5 %. Compared with the prior art, this method also avoids the problem of damage to the flexible base material caused by excessive temperature during the preparation process, so it can be applied to flexible piezoresistive sensing elements to realize the flexibility of piezoresistive sensing elements.

Description

technical field [0001] The invention belongs to the technical field of piezoresistive sensors, in particular to a preparation method and application of an amorphous carbon film with piezoresistive performance and toughness on the surface of a flexible substrate. Background technique [0002] In recent years, flexible strain sensing devices have been widely used in wearable devices, robots, biomonitoring, etc. The performance of the sensor is mainly determined by the sensitive material, and the piezoresistive sensitive material is a widely used sensitive material. An important parameter to characterize the performance of piezoresistive sensitive materials is the piezoresistive coefficient, which reflects the sensitivity of piezoresistive materials. [0003] The most representative piezoresistive sensitive material is single crystal silicon, but due to the reason of preparation process, its application in the field of flexible sensors is seldom. In recent years, new sensitiv...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/06C23C14/04
CPCC23C14/042C23C14/0605C23C14/3485C23C14/35
Inventor 汪爱英马鑫郭鹏张栋赵玉龙张琪
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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