A non-contact high-precision tool setting system based on optical evanescent waves

Abstract

The invention discloses a non-contact high-accuracy tool setting system based on an optical evanescent wave, and relates to the equipment field of tool calibration components in high-accuracy mechanical equipment. The non-contact high-accuracy tool setting system based on the optical evanescent wave comprises an evanescent wave generation module, a signal detection module and a computer, wherein the signal detection module comprises an objective lens, a convex lens, a band-pass filter and a signal detector which are sequentially arranged; a tool is capable of slightly touching with an evanescent wave interface at first, and then gradually away from the evanescent wave interface in the normal direction of the evanescent wave interface and according to a given step length, for example, 100nm; because the evanescent wave is exponentially decayed in the normal direction of the interface, after the tool is out of touch with the interface, light intensity generated by acting with the evanescent wave is also exponentially decayed along with the increasing of a distance between the tool and the interface; and therefore, the moving distance of the tool is fitted with the light intensity generated by acting with the evanescent wave, and a position where the tool is just out of touch with the interface can be obtained, so that nanoscale accuracy calibration is realized.

Description

technical field [0001] The invention relates to the equipment field of tool alignment components in high-precision mechanical equipment, in particular to a non-contact high-precision tool setting system based on optical evanescent waves. Background technique [0002] The tool setting system in mechanical equipment, as the calibration component of the equipment processing tool, plays a very important role in improving the qualified rate of one-time workpiece processing, increasing the effective working time of the equipment, and reducing the scrap rate and rework rate of the workpiece. Contact types can be divided into two types: contact and non-contact. For the contact tool setting system, the contact between the tool and the corresponding parts of the tool setting system will inevitably produce a certain degree of elastic deformation at the respective contact parts, resulting in measurement errors, making it difficult for the contact tool setting system to accurately measur...

AI Technical Summary

Problems solved by technology

However, because the existing non-contact tool setting system cannot form an accurate wide-area contact interface, it is also difficult to calibrate the tool with high precision

For example, when using a thin collimated beam for non-contact calibration of a tool, in order to meet the collimation conditions, the diameter of the laser beam will be within the millimeter range, so it cannot meet the micron-level tool calibration requirements in high-precision mechanical equipment

The same problem exists in the blowing non-contact tool setting system, which cannot form an accurate contact interface. Due to the limitation of the field of view, it is difficult for a high-magnification microscope to align a tool whose contact point cannot be determined.

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