3D structured light generating component

A structured light, 3D technology, applied in the direction of optical components, optics, instruments, etc.

Inactive Publication Date: 2019-09-06
苏州麦田光电技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] Aiming at the problem that traditional diffractive optical elements cannot simultaneously improve diffraction efficiency and processing accuracy, the present invention provides a 3D structured light generating element, which uses substructures with the same size and different rotation angles to replace the different substructures in traditional diffractive optical elements. The high step structure can not only improve the diffraction efficiency, but also improve the processing accuracy

Method used

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Experimental program
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specific Embodiment 1

[0103] This embodiment is an embodiment of a 3D structured light generating element.

[0104] A 3D structured light generating element in this embodiment is processed by a single projection exposure, atomic layer deposition and etching process, and the structural diagram is as follows figure 1 shown. The 3D structured light generating element includes a substrate structure and multiple substructures supported by the substrate structure. The substructures are arranged in a matrix on the surface of the substrate. In the row direction and column direction of the matrix, two adjacent substructures are in the The distance of the coordinates on the substrate is a fixed value, the size of the substructures is the same, and the rotation angles are different, the substructure is at the rotation angle θ around the normal line of the substrate coordinates (x, y) and the substructure is at the substrate coordinates (x, y) The corresponding phase φ(x,y) satisfies the following relationshi...

specific Embodiment 2

[0108] This embodiment is an embodiment of a 3D structured light generating element.

[0109] A 3D structured light generating element in this embodiment is further defined as follows on the basis of the specific embodiment 1:

[0110] Complex amplitude distribution g of incident light at substrate coordinates (x, y) 0 (x,y) is:

[0111]

[0112] Among them, A 0 (x, y) is the amplitude of the incident light at the substrate coordinates (x, y), φ 0 (x, y) is the phase of the incident light at the substrate coordinates (x, y), and i is the imaginary unit;

[0113] The complex amplitude transmittance t(x,y) of the substructure is:

[0114] t(x,y)=e iφ(x,y)

[0115] Among them, φ(x, y) is the phase distribution to be obtained;

[0116] The complex amplitude distribution g(x,y) of the incident light after passing through the substructure is:

[0117]

[0118] The complex amplitude distribution u(x 1 ,y 1 , z) is:

[0119]

[0120]

[0121] Among them, (x 1 ,y ...

specific Embodiment 3

[0146] This embodiment is an embodiment of a 3D structured light generating element.

[0147] A 3D structured light generating element of this embodiment is further defined on the basis of specific embodiment 1 or specific embodiment 2 if:

[0148] The incident light is visible light, the material of the substructure is titanium dioxide or gallium nitride, and the material of the substrate is silicon dioxide;

[0149] The incident light is infrared light, and the constituent materials of the substructure and the substrate are both silicon.

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Abstract

The invention discloses a 3D structured light generating component, and belongs to the technical field of optical components and structured light. The 3D structured light generating component comprises a substrate structure and a plurality of sub-structures supported by the substrate structure, and the sub-structures are arranged in a matrix mode on the surface of a substrate; in the row directionand the column direction of the matrix, the distance between the coordinates of the adjacent two sub-structures on the substrate is a fixed value, the size of the sub-structures is the same, the rotation angle is different, and the rotation angles and the phase of the sub-structures have a certain relationship. The 3D structured light generating component utilizes the sub-structures with same size and different rotation angles to replace step structures with different heights in a conventional diffractive optical element, since the heights are the same, only one processing is required, and the processing precision is improved; since the rotation angles can be continuous changed with the phase, and thus the loss of light in a material is ignored; and the diffraction efficiency of the 3D structured light generating component is not limited by theory, that is, the diffraction efficiency and the processing accuracy can be simultaneously improved.

Description

technical field [0001] A 3D structured light generating element of the invention belongs to the technical field of optical elements and structured light. Background technique [0002] In recent years, a 3D structured light measurement scheme based on lattice projection has been proposed. The principle is to generate a 3D structured light lattice through a diffractive optical element, project it on the surface of the measured object, and obtain the measured light by measuring the returned structured light lattice pattern. three-dimensional outline of the object. [0003] The article "Design and verification of diffractive optical elements for speckle generation of 3-D range sensors" and the article "Diffractive Element Design for Generating Multi-Channel Structured Light Field" all involve a diffractive optical element for generating 3D structured light lattices. Diffractive optical elements are characterized by step structures with different heights, and the phase correspon...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B27/42G02B27/00
CPCG02B27/0012G02B27/4205G02B27/4266
Inventor 金光国
Owner 苏州麦田光电技术有限公司
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