Detection device and method for measuring the surface shape of optical aspheric mirror by infrared interferometer

Abstract

The invention relates to a detection device and method for measuring an optical aspherical reflecting mirror surface shape by an infrared interferometer, and relates to the technical field of opticaldetection, in particular to a detection device and method for measuring an optical aspherical reflecting mirror surface shape by using the infrared interferometer. The detection device comprises the infrared laser interferometer, a spatial filter, a first collimating mirror, a reference reflecting mirror, a beam splitter, a standard lens, a standard lens clamping device, a clamping device of a lens to be tested, a second collimating mirror, an infrared detector, a phase shifter, a guide rail and a computer. A laser interferometry detection method is provided for production and scientific research departments on wave surface parameters such as aspherical PV and RMS, and an effective and reliable basis is provided for aspherical wave surface parameter evaluation.

Description

technical field [0001] The invention relates to the technical field of optical detection, in particular to a detection device and method for measuring the surface shape of an optical aspheric reflective mirror using an infrared interferometer for detection, and an infrared interferometer for on-line detection suitable for mass production. Background technique [0002] The use of aspheric optical components in the optical system can not only reduce the number and weight of optical components, reduce the size of the system, simplify the structure of the instrument, but also help correct aberrations, improve imaging quality, increase the freedom of optical design, and reduce costs. [0003] In recent years, due to the special processing characteristics of infrared materials such as germanium Ge and the development of single-point diamond turning technology, the processing technology and application of infrared optical aspheric elements have been developed rapidly. At the same ti...

AI Technical Summary

Problems solved by technology

[0007] What the present invention is to solve is the problem of difficulty in measuring the surface shape of existing aspheric mirrors, and provides a detection device and method for measuring the surface shape of optical aspheric mirrors using an infrared interferometer for detection, which is suitable for mass production of on-line detection infrared interferometers

Images