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A method for measuring the intrinsic deposition rate of a CVD/CVI process precursor

A technology of deposition rate and precursor, applied in metal material coating process, material absorption weighing, coating, etc., can solve the problems of high cost, difficult optical and electrical methods, etc., and achieve low cost and convenient operation. Effect

Active Publication Date: 2022-04-05
SHANGHAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, both optical and electrical methods are difficult to adapt to the CVD / CVI process, and the measured deposition rate represents the mixed deposition rate of various gas phase intermediates
Theoretically, the microbalance method can be integrated into the CVD / CVI process to measure the intrinsic deposition rate of the source gas, but the cost of achieving this goal is very high, and it is difficult to apply it to practical engineering

Method used

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  • A method for measuring the intrinsic deposition rate of a CVD/CVI process precursor
  • A method for measuring the intrinsic deposition rate of a CVD/CVI process precursor
  • A method for measuring the intrinsic deposition rate of a CVD/CVI process precursor

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Embodiment 1

[0035] A method for measuring the intrinsic deposition rate of a CVD / CVI process pyrolytic carbon precursor, comprising the following steps:

[0036] 1) Deposition substrate preparation: Prepare 7 cylindrical porous ceramic sheets, numbered 1, 2, 3, 4, 5, 6, 7, and weigh them to obtain their masses: 2.6288 g, 2.5583 g, 2.5301 g, 2.5613 g, 2.5823 g , 2.5672 g, 2.5980 g;

[0037] 2) Mold assembly: put 7 porous ceramic sheets vertically into the graphite mold in sequence, and assemble the mold;

[0038] 3) CVD / CVI deposition: put the mold into the constant temperature area of ​​the deposition furnace, feed nitrogen as a protective gas to raise the temperature, and control it to 5 kPa by a vacuum pump after reaching 950 °C, and feed propylene for CVD / CVI deposition;

[0039] 4) Weighing of the deposition substrate: After the deposition is completed, nitrogen gas is introduced to restore the pressure in the deposition furnace to normal pressure. After the temperature cools to room...

Embodiment 2

[0045] A method for measuring the intrinsic deposition rate of a CVD / CVI process pyrolytic carbon precursor, comprising the following steps:

[0046] 1) Deposition substrate preparation: prepare a cylindrical porous ceramic sheet and weigh it to obtain a mass of 2.9867 g;

[0047] 2) Mold assembly: put the ceramic sheet into the graphite mold and assemble the mold;

[0048] 3) CVD / CVI deposition: put the mold into the constant temperature area of ​​the deposition furnace, control the residence time to 0.125 s, pass in nitrogen as a protective gas to raise the temperature, and control it to 5 kPa by a vacuum pump after reaching 975 °C, and pass in propylene for CVD / CVI deposition;

[0049] 4) Weighing of the deposition substrate: After the deposition is completed, nitrogen gas is introduced to restore the pressure in the deposition furnace to normal pressure. After the temperature cools to room temperature, the nitrogen gas is stopped, and the mold is taken out from the depositi...

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PUM

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Abstract

The invention discloses a method for measuring the intrinsic deposition rate of a CVD / CVI process precursor. The intrinsic deposition rate measured by the invention has nothing to do with the gas-phase intermediate product, and represents the deposition rate of the source gas itself, and the deposition rate is measured through experiments. It is determined by the poor quality of the front and rear porous ceramic sheets, and the cost is low. The intrinsic deposition rate of the precursor can be obtained through simple data processing, which is convenient, fast and efficient.

Description

technical field [0001] The invention relates to a method for measuring the intrinsic deposition rate of a CVD / CVI process precursor. Background technique [0002] The chemical vapor deposition / infiltration (CVD / CVI) process is the main method for preparing high-performance coating materials, carbon-based and ceramic-based composite materials. However, there are problems such as long preparation period and high production cost, which limit the large-scale industrial application of coating materials, carbon-based and ceramic-based composite materials. Studying the pyrolysis and deposition mechanism of different precursors and measuring the deposition rate will help further optimize the CVD / CVI deposition process. [0003] The CVD / CVI process involves the homogeneous reaction of various pyrolysis intermediates in the gas phase and the heterogeneous reaction of various pyrolysis products on the surface of the deposition substrate. The commonly used methods for measuring deposi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N5/02C23C16/52
CPCG01N5/02C23C16/52
Inventor 张丹李爱军方文放
Owner SHANGHAI UNIV