Polishing liquid for KDP crystals and preparation method and application of polishing liquid

A technology of polishing liquid and crystal, applied in grinding/polishing equipment, manufacturing tools, metal processing equipment, etc., can solve problems such as damage and atomization of KDP crystal surface, and achieve the effect of simple steps, stable properties and convenient operation

Active Publication Date: 2019-10-01
INST OF MACHINERY MFG TECH CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In chemical mechanical polishing, the polishing liquid is one of the cores of the entire technical process, and its physical and chemical properties directly affect the precision level of chemical mechanical polishing. If the traditional polishing liquid is used, it will cause atomization or damage to the KDP crystal surface

Method used

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  • Polishing liquid for KDP crystals and preparation method and application of polishing liquid
  • Polishing liquid for KDP crystals and preparation method and application of polishing liquid
  • Polishing liquid for KDP crystals and preparation method and application of polishing liquid

Examples

Experimental program
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Effect test

Embodiment 1

[0040] The prepared polishing liquid is used for KDP crystal polishing, the specific process is:

[0041] 1) Obtaining the initial surface: the KDP crystal with a diameter of 50mm cut by single-point diamond is used as the crystal to be polished, and the surface roughness is 3.5nm;

[0042] 2) Preparation of polishing solution: mix the non-polar phase (cyclohexane) and the dual-solvent phase (isopropanol) according to a certain volume ratio, and after magnetically stirring evenly, add a certain volume of polar phase to the mixed solvent dropwise (water), the volume ratio of hexanaphthene, isopropanol and water in the final system is 36:604, leave standstill after stirring evenly, and seal up for subsequent use; In order to compare the advantages of the polishing solution of the present invention and the traditional water-in-oil microemulsion, we use The water-in-oil microemulsion formed in the ratio of oil phase (decanol), surfactant (TX-100) and water is 36:60:4 as the polish...

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Abstract

The invention discloses a polishing liquid for KDP crystals and a preparation method and application of the polishing liquid. The polishing liquid is prepared from, by volume percentage, 1-10% of a polar phase, 30-55% of a non-polar phase and the balance two-solvent phase. The polishing liquid is simple in preparation method and stable in property, fly cutter patterns can be effectively removed under the low polishing pressure of 1-2.5 kPa, subsurface damage and other problems possibly caused by high polishing pressure are avoided, and the surface roughness after polishing is improved to a certain extent. The components of the polishing liquid are common organic reagents and do not chemically react with KDP, no amphiphilic surfactant is adopted for the polishing liquid, and after polishing, the surface can be cleaned simply by adopting one component, namely the two-solvent phase, of the polishing liquid for simple surface flushing without generating any impurity residues on the surface.

Description

technical field [0001] The invention relates to the technical field of microemulsion polishing fluid for ultra-precision machining, in particular to a polishing fluid for KDP crystals and a preparation method and application thereof. Background technique [0002] Potassium dihydrogen phosphate (KDP) crystal is a very good nonlinear optical element, and it is currently the only nonlinear optical material that can be used for laser frequency doubling, electro-optic modulation and photoelectric switching devices in optical systems such as ICF and strong laser weapons. In engineering applications, the surface quality requirements of KDP crystals are extremely high, such as ultra-smoothness, no surface defects, no stress residues, and no impurity residues, which are close to the limit of material processing. However, the KDP crystal material itself is soft and brittle, easy to deliquescence, sensitive to temperature changes, and anisotropic, which makes processing KDP crystals ex...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C09G1/04B24B57/02
CPCB24B57/02C09G1/04
Inventor 董会潘金龙郭亮龙黄姝珂王超王利利李晓媛叶敏恒
Owner INST OF MACHINERY MFG TECH CHINA ACAD OF ENG PHYSICS
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