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Metamaterial uncooled infrared focal plane multicolor polarization detector and preparation method thereof

An uncooled infrared detector technology, applied in polarization spectrum, electric radiation detector, radiation pyrometry, etc., can solve the problem that infrared detectors are not compatible with wavelength detection and polarization detection, etc., to achieve the removal of background temperature interference, accurate The effect of high rate and reduced complexity

Inactive Publication Date: 2019-10-15
HUAZHONG UNIV OF SCI & TECH
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0005] Aiming at the defects of the prior art, the purpose of the present invention is to provide a metamaterial uncooled infrared focal plane polychromatic polarization detector and its preparation method, aiming at solving the problem that current infrared detectors are not compatible with wavelength detection and polarization at the pixel level. detection problem

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  • Metamaterial uncooled infrared focal plane multicolor polarization detector and preparation method thereof
  • Metamaterial uncooled infrared focal plane multicolor polarization detector and preparation method thereof
  • Metamaterial uncooled infrared focal plane multicolor polarization detector and preparation method thereof

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Embodiment 1

[0086] For the 3μm~5μm band, such as Figure 11 As shown, the period P of the patterned periodic metal array layer is 2.4 μm, the number of rectangles in the period is 6, and the width of the rectangular structure is W 1 =240nm,W 2 =400nm,W 3 =320nm,W 4 =320nm,W 5 =240nm,W 6 =240nm, the width of the rectangular interval d 01 =80nm,d 12 =80nm, d 23 =80nm, d 34 =80nm, d 45 =80nm, d 56 =80nm,d 67 = 160nm. Figure 12 The absorption characteristics of the structure in the range of 3 μm to 5 μm are shown. The average light absorption coefficient of the polarization direction along the x-axis is 0.7431, and the light average absorption coefficient of the polarization direction along the y-axis is 0.0193. The polarization selective absorption ratio is defined as the polarization direction along the x-axis The ratio of the average absorption coefficient of light in the range of 3 μm to 5 μm between the axis and the y axis is 38.50. For the 8μm ~ 12μm band, such as Figure...

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Abstract

The invention discloses a metamaterial uncooled infrared focal plane multicolor polarization detector and a preparation method thereof. The detector comprises multiple detector pixel units arranged inan array; the pixel unit comprises a substrate structure, a microbridge structure, and a metamaterial absorber structure; the substrate structure comprises a silicon substrate and a first metal electrode layer; the microbridge structure comprises a support layer, a thermo-sensitive layer, a second metal electrode layer and a passivation layer; the metamaterial absorber structure comprises a metalbase layer, a dielectric layer and a metal array layer, and the metal array layer comprises multiple metal arrays arranged in sequence; the four pixel units in two adjacent columns and two adjacent rows are formed into a pixel, the multiple pixel units in each pixel have the same structure, and can be separately formed into one another by rotating. According to the detector and the preparation method thereof provided by the invention, the polarization detection at different bands is achieved by using the strong light absorption at the resonant wavelength caused by the surface plasmon resonance phenomenon in the metamaterial absorber structure and the inherent polarization selection characteristic of the structure.

Description

technical field [0001] The invention belongs to the technical field of uncooled infrared focal plane array detectors, and more specifically relates to a metamaterial uncooled infrared focal plane multicolor polarization detector and a preparation method thereof. Background technique [0002] Infrared detectors are devices that use electromagnetic waves in the infrared band radiated by objects to obtain target information. Since objects with a temperature above absolute zero in nature will produce infrared radiation due to their own molecular motion, theoretically any object can obtain its information through infrared detectors, and this is especially important in scenes where visible light sources are missing (such as at night). Infrared detectors have the advantages of good environmental adaptability, strong concealment and anti-interference ability, and can identify camouflaged targets to a certain extent. , Industrial detection and other civil fields have been widely use...

Claims

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Application Information

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IPC IPC(8): G01J5/20G01J3/447G01J3/28
CPCG01J3/2803G01J3/447G01J5/20G01J2003/2806G01J2005/202
Inventor 易飞蒋顺李君宇
Owner HUAZHONG UNIV OF SCI & TECH
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