A wavefront error detection device and detection method based on extended Naipaul-Zernik mode optimized phase recovery

Abstract

The invention discloses a wavefront error detection device based on an extended Naipaul-Zernik mode optimized phase recovery, which includes a point light source, a half-mirror, a lens to be tested, a plane mirror, and an image sensor arranged in sequence. In this method, the wavefront error of the component under test is characterized by Zernike polynomials, and the Zernike polynomial coefficients are solved based on the extended Naipaul-Zernike diffraction theory. This method can realize one-time full-aperture wavefront error measurement of large-aperture optical elements, and can use partially overexposed images to achieve accurate restoration of wavefront errors, and overcome the problem of limited dynamic range when image sensors collect images. However, the contradiction between exposure and high signal-to-noise ratio. The detection experimental device is simple, and the requirements for the experimental environment are not high. The method is fast and simple. Compared with the traditional iterative phase recovery method, the calculation amount is small, the detection accuracy is high, and the anti-noise performance is strong.

Description

technical field [0001] The invention relates to the technical field of optical measurement, in particular to a wavefront error detection device and detection method based on extended Naipaul-Zernicke mode optimized phase recovery. Background technique [0002] As countries take inertial confinement fusion solid-state laser drivers as their strategic development goals, inertial confinement fusion high-power laser devices have become an important evaluation index of a country's comprehensive national strength. The research and control of laser wavefront distortion is an important part of the development process of laser inertial confinement fusion drive system. Laser wavefront distortion directly affects the performance of the beam and affects the uniformity of the system for bombarding the target pellet. Therefore, the study of wavefront distortion detection has important application value in inertial confinement nuclear fusion. The inertial confinement nuclear fusion drive ...

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Problems solved by technology

[0004] The purpose of the present invention is to address the deficiencies of the prior art, to provide a wavefront error detection device and detection method based on extended Naipaul-Zernicke mode optimized phase recovery, to solve the problem of traditional iterative phase recovery methods in measuring large-aperture optical When the lens wavefront error is caused by the detection error caused by the sub-aperture stitching method, the high number of samples causes a large amount of calculation, and the difficulty of accurately determining the defocus position is difficult

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