Automatic control method of hot wire CVD nano diamond coating

Abstract

The invention discloses an automatic control method of a hot wire CVD nano diamond coating. A diamond coating device firstly detects whether a hot wire temperature T1 is larger than a temperature control point T2 or not in real time, when the hot wire temperature T1 is larger than the temperature control point T2, the flow G1 of the reaction gas is determined according to the hot wire temperatureT1 at the moment, meanwhile, the gas flow of an output opening of a gas conveying assembly is set according to the gas flow G1, and the heating time M1 of the nucleation stage of a die inner hole andthe heating time M2 of the growth stage are determined according to the current hot wire temperature T1 and the gas flow G1. By means of the automatic control method, the gas flow of the reaction gas,the heating time of the nucleation stage of the nano diamond coating and the heating time of the growth stage can be automatically adjusted according to the hot wire temperature, the growth efficiency of the nano diamond coating of the die inner hole can be effectively improved, meanwhile, the nano diamond coating of the die inner hole can be more uniform, and the phenomenon that due to the excessive gas, waste is caused or due to the too little gas, the effect of the nano diamond coating is affected can be avoided.

Description

technical field [0001] The invention relates to the technical field of chemical vapor deposition coating equipment, in particular to an automatic control method for hot wire CVD nano-diamond coating. Background technique [0002] Chemical vapor deposition coating equipment uses various energy sources such as heating, plasma excitation or light radiation through chemical reaction to make gaseous or vapor state chemical substances react on the solid interface to form a layer of film in the coating equipment. At present, during the preparation of nano-diamond coating on the inner hole of the mold by the existing chemical vapor deposition coating equipment, the effect of the nano-diamond coating is closely related to the temperature of the hot wire, heating time, and the flow rate of the reaction gas. Under the same condition, if the temperature of the hot wire is not high enough, it is necessary to increase the reaction gas flow rate or prolong the heating time. Therefore, it ...

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Problems solved by technology

At present, during the preparation of nano-diamond coating on the inner hole of the mold by the existing chemical vapor deposition coating equipment, the effect of the nano-diamond coating is closely related to the temperature of the hot wire, heating time, and the flow rate of the reaction gas. Under the same condition, if the temperature of the hot wire is not high enough, it is necessary to increase the reaction gas flow rate or prolong the heating time

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