Film forming composition
A composition and member technology, applied in the direction of coating, etc., can solve the problem of insufficient curing speed and achieve the effect of excellent coatability
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[0138] Perhydropolysilazane (number average molecular weight: 800) and additives were dissolved in xylene, and filtered through a PTFE membrane filter with a pore size of 0.2 μm to obtain a composition. The content of perhydropolysilazane in the composition was set to 8% by mass based on the composition. The kinds and concentrations of additives are as shown in Table 1.
[0139] The obtained compositions were each applied to a 4-inch silicon wafer using a spin coater (manufactured by Mikasa Co. Ltd.). About coating conditions, it set so that the film thickness of the obtained film might become 200 nm.
[0140] Thereafter, curing is performed at room temperature, 80°C, or 130°C. The progress of hardening was observed by FT-IR. Then, the time (number of days) until the perhydropolysilazane was completely converted to silica under each condition was measured. The obtained results are shown in Table 1.
[0141] Table 1
[0142]
[0143]
[0144] *1: The content of addi...
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