Thermal drift measurement method for scanning galvanometer type laser processing system

Abstract

The invention provides a thermal drift measurement method for a scanning galvanometer type laser processing system. The thermal drift is predicted by establishing a prediction model of a temperature difference value and a light spot coordinate difference value. The method comprises the following steps that 1, an optical sensor is placed on a machining face, and temperature sensors are placed on ashell on the left side of an x galvanometer motor, a shell near a y galvanometer motor, an x galvanometer cooling fin, a shell on the right side of the x galvanometer motor and a y galvanometer cooling fin; 2, the light spot coordinate value and the temperature value are recorded every 5 minutes; 3, the relationship between the light spot coordinate difference value and the temperature differencevalue is analyzed; 4, the prediction model of the temperature difference value and the light spot coordinate difference value is established; 5, a linear correlation coefficient of the temperature difference value and the x and y coordinate difference values of the light spot are obtained by calculation; and 6, a residual average value is resolved, and the residual value in the prediction model with the residual average value is replaced to obtain a complete prediction model.

Description

technical field [0001] The invention relates to a method for measuring light point drift for a scanning galvanometer laser processing system, in particular to a method for measuring light spot thermal drift for a scanning galvanometer laser processing system. Background technique [0002] In recent years, double-galvanometer laser scanning processing technology has become more and more popular, with high processing efficiency and good processing accuracy, so this technology is becoming more and more popular. In order to achieve higher processing accuracy, it is necessary to study the scanning galvanometer laser processing system. various distortion errors. Through the analysis and summary, it is found that the obvious errors include the error caused by the nonlinearity of the mapping relationship, the error caused by adding the F-theta focusing lens, the error caused by the offset of the scanning mirror, and the thermal error. After experiments, it is found that the coordin...

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Problems solved by technology

After experiments, it is found that the coordinate drift of the processing light spot is more obvious due to temperature changes

[0003] However, in the prior art, there is no detection method and prediction model that can accurately obtain the relationship between the temperature difference and the coordinate drift of the light spot.

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