A mesoporous pdo-wo 3 Composite resistive thin film and its preparation method and application
A composite resistor and thin film technology, applied in the field of sensors, can solve the problems of long response time and recovery time, poor stability of gas sensors, complicated preparation process, etc., and achieve the effects of improving recovery time, easy operation, and simple manufacturing process
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Embodiment 1
[0043] (1) Weigh 1g of F127 powder and add it to a conical flask with 20ml of absolute ethanol, stir for 30 minutes until F127 dissolves, then add 1g of WCl 6 The powder was placed in a 40°C oil bath, heated, sealed and stirred for 3 hours, and then stood at room temperature for 24 hours to obtain a tungsten precursor solution;
[0044] (2) Weigh 0.165g of F127 powder and add it to an Erlenmeyer flask with 10ml of absolute ethanol and 1ml of deionized water, stir for 15 minutes until F127 is dissolved, then add 0.0045g of PdCl 2 The powder was placed in a 35°C oil bath, heated, sealed and stirred for 3 hours, and then left to stand at room temperature for 24 hours to obtain a palladium precursor solution;
[0045] (3) Place the silicon substrate with the interdigitated platinum electrodes successively in acetone, absolute ethanol and deionized water for 4-5 minutes, and then put it in an oven at 100°C to dry for later use;
[0046] (4) alternately spin-coat the precursor solu...
Embodiment 2
[0061] (1) Weigh 1g of F127 powder and add it to a conical flask with 20ml of absolute ethanol, stir for 30 minutes until F127 dissolves, then add 1g of WCl 6 Put the powder in an oil bath at 45°C, heat, seal and stir for 2 hours, then let it stand at room temperature for 24 hours to obtain a tungsten precursor solution;
[0062] (2) Weigh 0.165g of F127 powder and add it to an Erlenmeyer flask with 10ml of absolute ethanol and 2ml of deionized water, stir for 15 minutes until F127 dissolves, then add 0.0225g of PdCl 2 The powder was placed in a 35°C oil bath, heated, sealed and stirred for 3 hours, and then left to stand at room temperature for 24 hours to obtain a palladium precursor solution;
[0063] (3) Place the silicon substrate with the interdigitated platinum electrodes successively in acetone, absolute ethanol and deionized water for 4-5 minutes, and then put it in an oven at 100°C to dry for later use;
[0064] (4) alternately spin-coat the precursor solution of tu...
Embodiment 3
[0071] (1) Weigh 1g of F127 powder and add it to a conical flask with 20ml of absolute ethanol, stir for 30 minutes until F127 dissolves, then add 1g of WCl 6 The powder was placed in a 50°C oil bath, heated, sealed and stirred for 1 hour, and then stood at room temperature for 24 hours to obtain a tungsten precursor solution;
[0072] (2) Weigh 0.165g of F127 powder and add it to an Erlenmeyer flask with 10ml of absolute ethanol and 3ml of deionized water, stir for 15 minutes until F127 dissolves, then add 0.045g of PdCl 2 The powder was placed in a 35°C oil bath, heated, sealed and stirred for 3 hours, and then left to stand at room temperature for 24 hours to obtain a palladium precursor solution;
[0073] (3) Place the silicon substrate with the interdigitated platinum electrodes successively in acetone, absolute ethanol and deionized water for 4-5 minutes, and then put it in an oven at 100°C to dry for later use;
[0074] (4) alternately spin-coat the precursor solution ...
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