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Method for preparing hard thin film on flexible substrate and related product

A flexible matrix, hard technology, applied in the field of membrane materials, can solve the problems of easy cracking and peeling, coating cracking, insufficient bonding strength, etc., and achieve the effect of improving bonding strength, improving service performance, and stable structure

Active Publication Date: 2019-12-17
北京市辐射中心 +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, it has been found through experiments that the existing flexible substrate-metal transition layer-hard coating three-layer hard film has problems of insufficient bonding strength, easy cracking and falling off during use.
Especially for workpieces that need to be bent in the working environment, after multiple bending and deformation cycles, the coating cracks and falls off on the hard coating at the bending position, resulting in unusable and premature failure of the workpiece

Method used

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  • Method for preparing hard thin film on flexible substrate and related product
  • Method for preparing hard thin film on flexible substrate and related product
  • Method for preparing hard thin film on flexible substrate and related product

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Embodiment Construction

[0028] In order to enable those skilled in the art to better understand the solutions of the present invention, the embodiments of the present invention will be described below with reference to the drawings in the embodiments of the present invention.

[0029] see figure 1 , a schematic flow chart of a method for preparing a hard film on a flexible substrate in an embodiment of the present invention, the method for preparing a hard film on a flexible substrate includes:

[0030] 101. Using a gas ion source to generate inert gas ions to clean the substrate layer.

[0031] Specifically, during the pre-sputtering cleaning of the base layer during the preparation of the hard film in this step, the base layer is cleaned by using the gas ion source to generate inert gas ions. The base layer may be polyimide polymer or other flexible base layer material, and the inert gas ions may be Ar ions. During specific implementation, for example, the substrate layer is a polyimide film, and...

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Abstract

The invention relates to the technical field of film materials, and discloses a method for preparing a hard thin film on a flexible substrate and a related product. The method for preparing the hard thin film on the flexible substrate comprises the steps that after cleaning treatment is conducted on the flexible substrate through a gas ion source, a metal film layer, an organic-metal heterojunction and a metal transition layer are sequentially prepared on the flexible substrate in a deposition manner by adopting a magnetic filtration technique, then a gradient transition layer and the hard thin film are prepared through a high-power pulsed magnetron sputtering technique, and preparation of the hard thin film on the flexible substrate is completed. According to the preparation method of theembodiment, the structure of the prepared hard thin film is more steady, the bonding strength of coating interfaces in the hard thin film can be greatly improved, and the using performance of a workpiece using the hard thin film is further improved.

Description

technical field [0001] The invention relates to the technical field of film materials, in particular to a method for preparing a hard film on a flexible substrate and related products. Background technique [0002] The hard film is mainly used in the field of traditional machinery manufacturing and processing. The application and promotion of the hard film can effectively improve the performance of the workpiece, improve the processing efficiency of the workpiece, and prolong the service life of the workpiece. [0003] With the advancement of science and technology, the scope of application of hard films has gradually expanded to emerging industries, such as in the fields of biomedical, flexible electronic devices, flat panel displays, and micro-electromechanical devices, where they are used in the form of protective coatings or wear-resistant coatings. However, compared with traditional industries that mainly use metal or alloy surfaces, rigid films need to protect a large ...

Claims

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Application Information

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IPC IPC(8): C23C14/32C23C14/35C23C14/20C23C14/16C23C14/06
CPCC23C14/0635C23C14/0641C23C14/0664C23C14/16C23C14/165C23C14/20C23C14/325C23C14/3485C23C14/35
Inventor 欧伊翔王浩琦张旭罗军陈琳庞盼廖斌
Owner 北京市辐射中心
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