Vertical magnetron sputtering coating device for long outer cladding tube

Abstract

The invention discloses a vertical magnetron sputtering coating device for a long outer cladding tube. The device comprises a shell, wherein the shell is provided with a cylindrical cavity with an opening at the top, a rotating device connected with a transmission device outside the shell is arranged at the bottom in the cavity, and a workpiece frame is arranged on the rotating device; a pluralityof pairs of target seat bottom discs are installed on the inner wall of the cavity along the axial direction thereof, a plurality of target seats are distributed on each target seat bottom disc, thetarget seats are used for installing metal target materials, a cavity door used for replacing the metal target materials is arranged beside each pair of target seat bottom discs, and shielding platesare arranged on the target seats; and an air inlet and outlet device and a high-pressure air outlet are formed in the top of the cavity, and during work, the metal target materials are connected witha negative electrode of an external circuit through seat electrodes, and the workpiece frame is connected with a positive electrode of the external circuit through the seat electrodes. According to the device, the structure is simple, the operation is convenient, a deposited film is uniform, when the target materials are subjected to magnetron sputtering, the atomic deposition rate of a cladding material is guaranteed due to the constraint of magnetic lines of force, raw materials are saved, and the production efficiency and the finished product quality are improved.

Description

Technical field [0001] The invention belongs to the field of magnetron sputtering coating, and in particular relates to a vertical magnetron sputtering coating device for a long outer envelope tube. Background technique [0002] At present, the world's demand for clean energy is increasing, and nuclear power has the advantages of green environmental protection and huge production capacity. At the same time, as a high-radiation industry, its safety issues cannot be underestimated. The high-temperature water vapor that drives the generator is discharged through a pressure tube made of zirconium alloy as the main material. The neutron absorption cross-section of pure zirconium is very low, but because its strength and corrosion resistance cannot meet the requirements of manufacturing pressure tubes, people often add some alloying elements to zirconium to improve its mechanical properties and corrosion resistance without increasing significantly. Where the sub-absorption cross-secti...

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Problems solved by technology

[0004] In the existing magnetron sputtering technology, there is no equipment that can use the method of magnetron sputtering to coat zirconium alloy tubes with a length of 4 meters or more at one time.

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