Piezoelectric MEMS microphone
A microphone and piezoelectric technology, which is applied in the field of piezoelectric MEMS microphones, can solve problems such as the reduction of resonance frequency, the increase of piezoelectric MEMS noise, and the inability to meet user needs, and achieve the effect of reducing noise and improving resonance frequency
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[0029] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0030] It should be noted that all directional indications (such as up, down, inside, outside, top, bottom...) in the embodiments of the present invention are only used to explain the relationship between the components in a certain posture (as shown in the drawings). If the specific posture changes, the directional indication will also change accordingly.
[0031] It should also be noted that when an element is referred to as being “fixed” or “disposed on” another element, the element may be directly on the other element or there may be an intervening element at the same time. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present.
[0032] see Figure 1 to Figure 8 , the embodiment of the present invention provides a piezoelectric MEMS micr...
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