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A ceramic heater supporting base and ceramic heater

A technology of ceramic heaters and supporting substrates, which is applied to heating elements, ohmic resistance heating parts, etc., can solve the problems of scrapping heaters, etc., and achieve the effects of beautiful patterns, increased economic benefits, and neat edges

Active Publication Date: 2021-06-25
博宇(天津)半导体材料有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] Existing heaters generally deposit a layer of pyrolytic graphite on a support substrate, and (afterwards) engrave the pyrolytic graphite to make a pattern, but it is very easy to cause residue when the pyrolytic graphite surface is processed (patterned) to form a pattern. Delamination at the edge of the pyrolytic graphite on the surface of the supporting substrate, which can lead to the failure of the entire heater

Method used

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  • A ceramic heater supporting base and ceramic heater
  • A ceramic heater supporting base and ceramic heater
  • A ceramic heater supporting base and ceramic heater

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] figure 1 It is a structural schematic diagram of the ceramic heater supporting base in Example 1 of the present invention.

[0031] Such as figure 1 As shown, this embodiment provides a ceramic heater support base, the surface of the ceramic heater support base is formed with a first region 1 and a second region 2; the roughness of the first region 1 is greater than that of the second region 2 . A conductive material layer is disposed on the first region 1 .

[0032] The roughness of the first region 1 is large, and the conductive material layer deposited on the first region 1 is not easy to fall off, and the roughness of the second region 2 is small, and the conductive material layer deposited on the second region 2 is easy to fall off. In this embodiment, the fine control of the surface roughness of the first area 1 and the second area 2 of the ceramic heater support base is carried out. After the conductive material layer is deposited on the surface of the ceramic ...

Embodiment 2

[0044] figure 2 It is a structural schematic diagram of the ceramic heater of Example 2 of the present invention.

[0045] Such as figure 2 As shown, the ceramic heater of this embodiment includes the ceramic heater supporting base of Embodiment 1, and further includes a conductive material layer and an insulating layer arranged in sequence; the conductive material layer covers the first region 1 .

[0046] With the insulating layer protection resistor, it can be used stably even in a high-temperature heating process near 1500°C, and even in a heating process that rapidly raises and lowers the temperature at a rate of 100°C / min or more.

[0047] Wherein, the first area 1 protrudes from the second area 2 .

[0048] Specifically, the conductive material layer is made of pyrolytic graphite. The thickness of the conductive material layer is preferably 10-300 μm, more preferably 30-150 μm. When energized, the conductive material layer generates heat to heat the object to be hea...

Embodiment 3

[0051] image 3 It is a structural schematic diagram of the ceramic heater of Example 3 of the present invention.

[0052] Such as image 3 As shown, the difference between the ceramic heater of this embodiment and Embodiment 2 is that the second region 2 of this embodiment protrudes from the first region 1 .

[0053] The present invention aims to protect a ceramic heater support base and a ceramic heater, by finely controlling the surface roughness of the first area and the second area of ​​the ceramic heater support base, when a conductive material layer is deposited on the ceramic heater support After being on the surface of the substrate, the conductive material on the conductive area is closely attached to the first area, and the conductive material on the insulating area can fall off naturally or be removed by a simple tool such as a knife. The operation is simple, the pattern is beautiful, and the edge of the conductive material layer Neat, without layers, so that the...

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Abstract

A ceramic heater supporting base and a ceramic heater, wherein a first area and a second area are formed on the surface of the ceramic heater supporting base; the roughness of the first area is greater than that of the second area. The ceramic heater has a conductive area and an insulating area; the first area of ​​the ceramic heater support base is covered with a conductive material layer to form a conductive area, and the second area is not covered with a conductive material layer and is an insulating area. By finely controlling the surface roughness of the first region and the second region of the ceramic heater support base, after the conductive material layer is deposited on the surface of the ceramic heater support base, the conductive material on the conductive region adheres closely to the first In terms of area, the conductive material on the insulating area can fall off naturally or be removed by simple tools such as a knife. benefit.

Description

technical field [0001] The invention relates to the technical field of heaters, in particular to a ceramic heater supporting base and a ceramic heater. Background technique [0002] Existing heaters generally deposit a layer of pyrolytic graphite on a support substrate, and (afterwards) engrave the pyrolytic graphite to make a pattern, but it is very easy to cause residue when the pyrolytic graphite surface is processed (patterned) to form a pattern. Delamination at the edge of the pyrolytic graphite on the surface of the supporting substrate can lead to failure of the entire heater. Contents of the invention [0003] (1) Purpose of the invention [0004] The object of the present invention is to provide a ceramic heater supporting base and a ceramic heater which can increase the yield of the ceramic heater. [0005] (2) Technical solution [0006] In order to solve the above problems, the first aspect of the present invention provides a ceramic heater supporting base, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H05B3/06
CPCH05B3/06
Inventor 何军舫
Owner 博宇(天津)半导体材料有限公司