Large-caliber reflector resistance heat evaporation coating device

Abstract

The invention belongs to the field of vacuum coating, and provides a large-caliber reflector resistance heat evaporation coating device. According to the technical scheme, the large-caliber reflectorresistance heat evaporation coating device comprises a vacuumizing system, a vacuum evaporation chamber, evaporation source chambers, an ion beam auxiliary device and a film thickness control device,wherein the evaporation source chambers are a plurality of independent evaporation source chambers and are evenly arranged on the chamber wall of the vacuum evaporation chamber; a vacuum valve is arranged between each evaporation source chamber and the vacuum evaporation chamber; a workpiece rotating device is arranged at the center position of the bottom of the vacuum evaporation chamber and is composed of a reflector supporting mechanism, a rotating shaft 10 and a rotating motor; and the ion beam auxiliary device is composed of multiple ion sources and is arranged on the inner wall of a cavity of the vacuum evaporation chamber. By means of the device, influences of metal liquid drop splashing, dripping and the like on the film layer quality are avoided, and risks in the large-caliber reflector coating process are greatly reduced.

Description

technical field [0001] The invention relates to the field of vacuum coating, in particular to a resistance thermal evaporation coating device for a large-diameter reflector. Background technique [0002] The development of telescopes has extended the limit of human vision, allowing humans to appreciate the vastness of the universe, and has also laid the foundation for the continuous progress of astronomy. For the optical system, the resolution of the system depends on the size of the clear aperture. The larger the clear aperture, the higher the resolution of the optical system. The aperture of the astronomical telescope has gradually developed from the initial 4.2cm to 2.4m or even 8.4m. To meet the requirements of observing more distant targets and obtaining clearer images, the manufacturing capabilities of large-aperture optical components have continuously made breakthroughs and achieved rapid development. [0003] Reflective telescopes are currently the most widely used...

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Problems solved by technology

[0006] The purpose of the present invention is to provide a resistance thermal evaporation coating device for large-diameter reflectors, so as to overcome the problems in the prior art that it is difficult to carry out the operation when uploading, the manufacturing cost is increased, and the coating quality is difficult to guarantee when installing.

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